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Sensors 2012, 12(12), 17094-17111; doi:10.3390/s121217094

CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties

Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Kaohsiung 80424, Taiwan
Department of Mechanical and Electro-Mechanical Engineering, Center of Green Technology, National ILan University, ILan 260, Taiwan
Institute of Applied Mechanics, National Taiwan University, Taipei 10617, Taiwan
Author to whom correspondence should be addressed.
Received: 25 October 2012 / Revised: 28 November 2012 / Accepted: 6 December 2012 / Published: 12 December 2012
(This article belongs to the Section Physical Sensors)
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This paper develops the technologies of mechanical characterization of CMOS-MEMS devices, and presents a robust algorithm for extracting mechanical properties, such as Young’s modulus, and mean stress, through the external electrical circuit behavior of the micro test-key. An approximate analytical solution for the pull-in voltage of bridge-type test-key subjected to electrostatic load and initial stress is derived based on Euler’s beam model and the minimum energy method. Then one can use the aforesaid closed form solution of the pull-in voltage to extract the Young’s modulus and mean stress of the test structures. The test cases include the test-key fabricated by a TSMC 0.18 μm standard CMOS process, and the experimental results refer to Osterberg’s work on the pull-in voltage of single crystal silicone microbridges. The extracted material properties calculated by the present algorithm are valid. Besides, this paper also analyzes the robustness of this algorithm regarding the dimension effects of test-keys. This mechanical properties extracting method is expected to be applicable to the wafer-level testing in micro-device manufacture and compatible with the wafer-level testing in IC industry since the test process is non-destructive.
Keywords: pull-in voltage; Young’s modulus; mean stress; CMOS-MEMS pull-in voltage; Young’s modulus; mean stress; CMOS-MEMS
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Chuang, W.-C.; Hu, Y.-C.; Chang, P.-Z. CMOS-MEMS Test-Key for Extracting Wafer-Level Mechanical Properties. Sensors 2012, 12, 17094-17111.

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