Next Article in Journal
Use of Slag/Sugar Cane Bagasse Ash (SCBA) Blends in the Production of Alkali-Activated Materials
Next Article in Special Issue
Local Synthesis of Carbon Nanotubes in Silicon Microsystems: The Effect of Temperature Distribution on Growth Structure
Previous Article in Journal
Red, Green, and Blue Photoluminescence of Ba2SiO4:M (M = Eu3+, Eu2+, Sr2+) Nanophosphors
Previous Article in Special Issue
Enrichment of Large-Diameter Single-Walled Carbon Nanotubes (SWNTs) with Metallo-Octaethylporphyrins
Article Menu

Export Article

Open AccessArticle
Materials 2013, 6(8), 3094-3107; doi:10.3390/ma6083094

Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts

Department of Micro and Nano Systems Technology (IMST), Vestfold University College (HiVe), Raveien 197, 3184 Borre, P.O. Box 2243, Tønsberg N-3103, Norway
Author to whom correspondence should be addressed.
Received: 30 April 2013 / Revised: 10 July 2013 / Accepted: 18 July 2013 / Published: 24 July 2013
(This article belongs to the Special Issue Carbon Nanotubes)
View Full-Text   |   Download PDF [932 KB, uploaded 24 July 2013]   |  


Carbon nanotubes (CNTs) have been directly grown onto a silicon microsystem by a local synthesis method. This method has potential for wafer-level complimentary metal-oxide-semiconductor (CMOS) transistor-compatible integration of CNTs into more complex Si microsystems; enabling, e.g., gas sensors at low cost. In this work, we demonstrate that the characteristics of CNTs grown on specific locations can be changed by tuning the synthesis conditions. We also investigate the role of the contact between CNTs and the Si microsystem; observing a large influence on the electrical characteristics of our devices. Different contact modes can render either an ohmic or Schottky-like rectifying characteristics. View Full-Text
Keywords: carbon nanotubes; local synthesis; microheater; contacts; Schottky barrier carbon nanotubes; local synthesis; microheater; contacts; Schottky barrier

Figure 1

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Haugen, T.B.; Ta, B.Q.; Halvorsen, E.; Hoivik, N.; Aasmundtveit, K.E. Integration of Carbon Nanotubes in Microsystems: Local Growth and Electrical Properties of Contacts. Materials 2013, 6, 3094-3107.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Materials EISSN 1996-1944 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top