Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor
Abstract
:1. Introduction
2. Materials and Methods
2.1. The Design of the Sensor
2.2. Fabrication Challenges of the Sensor and Solutions
2.3. Measurement Processes
3. Results and Discussion
3.1. Design Criteria
3.2. Temperature Distribution on the Membrane
3.3. Thermal Characteristic of the Sensor and the Response in Hydrogen Gas
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Design Sample | Design Criteria |
---|---|
A1 | Main design (explained in Section 2.1) |
A2 | Half width of the thermopile structures |
A3 | Different heater design (round) |
A4 | Higher number of thermocouples |
A5 | Larger membrane |
A6 | Smaller membrane |
Sensor Type | A1 | A2 | A3 | A4 | A5 | A6 | A1 |
---|---|---|---|---|---|---|---|
R Thermopile at 27 °C (kΩ) | 194 | 438 | 210 | 212 | 192 | 196 | 194 |
Output of one thermocouple/°C (µV/K) | 273 | 196 | 138 | 160 | 92.2 | 336 | 273 |
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Pranti, A.S.; Loof, D.; Kunz, S.; Zielasek, V.; Bäumer, M.; Lang, W. Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor. Micromachines 2019, 10, 650. https://doi.org/10.3390/mi10100650
Pranti AS, Loof D, Kunz S, Zielasek V, Bäumer M, Lang W. Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor. Micromachines. 2019; 10(10):650. https://doi.org/10.3390/mi10100650
Chicago/Turabian StylePranti, Anmona Shabnam, Daniel Loof, Sebastian Kunz, Volkmar Zielasek, Marcus Bäumer, and Walter Lang. 2019. "Design and Fabrication Challenges of a Highly Sensitive Thermoelectric-Based Hydrogen Gas Sensor" Micromachines 10, no. 10: 650. https://doi.org/10.3390/mi10100650