Micromachines — Open Access Journal of Micro/Nano Sciences, Devices and Applications

The spray pyrolysis technique has been extensively used to synthesize materials for a wide variety of applications such as micro and sub-micrometer dimension MOSFET´s for integrated circuits technology, light emitting devices for displays, and solid-state lighting, planar waveguides and other multilayer structure devices for photonics. This technique is an atmospheric pressure chemical synthesis of materials, in which a precursor solution of chemical compounds in the proper solvent is sprayed and converted into powders or films through a pyrolysis process. The most common ways to generate the aerosol for the spraying process are by pneumatic and ultrasonic systems. The synthesis parameters are usually optimized for the materials optical, structural, electric and mechanical characteristics required. There are several reviews of the research efforts in which spray pyrolysis and the processes involved have been described in detail. This review is intended to focus on research work developed with this technique in relation to high-K dielectric and luminescent materials in the form of coatings and powders as well as multiple layered structures. Full article

This paper demonstrates the four fold enhancement in quality factor (Q) of a very high frequency (VHF) band piezoelectric Aluminum Nitride (AlN) on Silicon (Si) Lamb mode resonator by applying a unique wide acoustic bandgap (ABG) phononic crystal (PnC) at the anchoring boundaries of the resonator. The PnC unit cell topology, based on a solid disk, is characterized by a wide ABG of 120 MHz around a center frequency of 144.7 MHz from the experiments. The resulting wide ABG described in this work allows for greater enhancement in Q compared to previously reported PnC cell topologies characterized by narrower ABGs. The effect of geometrical variations to the proposed PnC cells on their corresponding ABGs are described through simulations and validated by transmission measurements of fabricated delay lines that incorporate these solid disk PnCs. Experiments demonstrate that widening the ABG associated with the PnC described herein provides for higher Q. Full article

Intracortical neural interfaces (INI) have made impressive progress in recent years but still display questionable long-term reliability. Here, we report on the development and characterization of highly resilient monolithic silicon carbide (SiC) neural devices. SiC is a physically robust, biocompatible, and chemically inert semiconductor. The device support was micromachined from p-type SiC with conductors created from n-type SiC, simultaneously providing electrical isolation through the resulting p-n junction. Electrodes possessed geometric surface area (GSA) varying from 496 to 500 K μm². Electrical characterization showed high-performance p-n diode behavior, with typical turn-on voltages of ~2.3 V and reverse bias leakage below 1 nArms. Current leakage between adjacent electrodes was ~7.5 nArms over a voltage range of −50 V to 50 V. The devices interacted electrochemically with a purely capacitive relationship at frequencies less than 10 kHz. Electrode impedance ranged from 675 ± 130 kΩ (GSA = 496 µm²) to 46.5 ± 4.80 kΩ (GSA = 500 K µm²). Since the all-SiC devices rely on the integration of only robust and highly compatible SiC material, they offer a promising solution to probe delamination and biological rejection associated with the use of multiple materials used in many current INI devices. Full article

This paper discusses the classification of horse gaits for self-coaching using an ensemble stacked auto-encoder (ESAE) based on wavelet packets from the motion data of the horse rider. For this purpose, we built an ESAE and used probability values at the end of the softmax classifier. First, we initialized variables such as hidden nodes, weight, and max epoch using the options of the auto-encoder (AE). Second, the ESAE model is trained by feedforward, back propagation, and gradient calculation. Next, the parameters are updated by a gradient descent mechanism as new parameters. Finally, once the error value is satisfied, the algorithm terminates. The experiments were performed to classify horse gaits for self-coaching. We constructed the motion data of a horse rider. For the experiment, an expert horse rider of the national team wore a suit containing 16 inertial sensors based on a wireless network. To improve and quantify the performance of the classification, we used three methods (wavelet packet, statistical value, and ensemble model), as well as cross entropy with mean squared error. The experimental results revealed that the proposed method showed good performance when compared with conventional algorithms such as the support vector machine (SVM). Full article

In this paper, we have proposed a polymer-based photonic crystal (PhC) resonator, with multiple sizes of cavities, and a waveguide to be used as highly sensitive optical sensor components. Properties of the proposed PhC were simulated by the finite-difference time-domain method, and the polymer-based PhC resonator and waveguide were fabricated on a photoresist (polymer) by electron beam lithography, which was prepared on an Au-layer-deposited Si substrate. We detected the resonant light that penetrated through the waveguide and was trapped in the PhC resonator. Optical characteristics of the fabricated PhC were evaluated by detecting the polymer layer deposition process by using the layer-by-layer (LbL) method to deposit polymer layers. As a result, by using an optimized design of a polymer-based PhC resonator with a long cavity (equivalent to a defect of three holes), the PhC structure changes caused by LbL deposition lead to changes in resonant light wavelength (peak shift: 5.26 nm/layer). Therefore, we suggest that a PhC resonator and a waveguide is applicable as an optical sensor. Full article

Conventional manufacturing of microfluidic devices from glass substrates is a complex, multi-step process that involves different fabrication techniques and tools. Hence, it is time-consuming and expensive, in particular for the prototyping of microfluidic devices in low quantities. This article describes a laser-based process that enables the rapid manufacturing of enclosed micro-structures by laser micromachining and microwelding of two 1.1-mm-thick borosilicate glass plates. The fabrication process was carried out only with a picosecond laser (Trumpf TruMicro 5×50) that was used for: (a) the generation of microfluidic patterns on glass, (b) the drilling of inlet/outlet ports into the material, and (c) the bonding of two glass plates together in order to enclose the laser-generated microstructures. Using this manufacturing approach, a fully-functional microfluidic device can be fabricated in less than two hours. Initial fluid flow experiments proved that the laser-generated microstructures are completely sealed; thus, they show a potential use in many industrial and scientific areas. This includes geological and petroleum engineering research, where such microfluidic devices can be used to investigate single-phase and multi-phase flow of various fluids (such as brine, oil, and CO₂) in porous media. Full article

In this work, a mini monitoring system integrated with a microfabricated metal oxide array sensor and a micro packed gas chromatographic (GC) column was developed for monitoring environmental gases. The microfabricated packed GC column with a 1.6 m length was used to separate the environmental gas, and the metal oxide semiconductor (MOS) array sensor, fabricated with nano-sized SnO-SnO₂ sensitive materials, was able to effectively detect each component separated by GC column. The results demonstrate that the monitoring system can detect environmental gas with high precision. Full article

Triboelectric nanogenerators (TENGs) are used as self-power sources for various types of devices by converting external waves, wind, or other mechanical energies into electric power. However, obtaining a high-output performance is still of major concern for many applications. In this study, to enhance the output performance of polydimethylsiloxane (PDMS)-based TENGs, highly dielectric TiO_2−x nanoparticles (NPs) were embedded as a function of weight ratio. TiO_2−x NPs embedded in PDMS at 5% showed the highest output voltage and current. The improved output performance at 5% is strongly related to the change of oxygen vacancies on the PDMS surface, as well as the increased dielectric constant. Specifically, oxygen vacancies in the oxide nanoparticles are electrically positive charges, which is an important factor that can contribute to the exchange and trapping of electrons when driving a TENG. However, in TiO_2−x NPs containing over 5%, the output performance was significantly degraded because of the increased leakage characteristics of the PDMS layer due to TiO_2−x NPs aggregation, which formed an electron path. Full article

Soft lithography and replica molding have been an integral part of polymer basic microfabrication for over 20 years. The use of silicone rubber materials as either molds or directly molded parts are well described in the literature and have provided researchers with an easily accessible technique to reproduce complex micro and nanostructures with minimal costs and technical challenges. Yet, for many applications, the use of standard silicones may not necessarily be the best choice, either as a mold material or as a replicated surface. For those instances where a mold is required that is high temperature tolerant, flexible, durable and capable of being used as a mold for multiple materials including silicone rubber, the most commonly used silicone rubber, Sylgard-184, has substantial deficiencies. In this work, we introduce a new material, Fluorosilicone that has not been described in the microfabrication field in detail and determine it is capable of reproducing micro structures via soft lithography techniques and being used as a mold for thermoplastic and thermosetting polymers, including silicone rubbers. Material compatibility, appropriate processing conditions for quality replicas and demonstration of extremely fast production of silicone microstructures are reported. Full article

The high-vacuum self-pumping MEMS cell for atomic spectroscopy presented here is the result of the technological achievements of the author and the research group in which he works. A high-temperature anodic bonding process in vacuum or buffer gas atmosphere and the influence of the process on the inner gas composition inside a MEMS structure were studied. A laser-induced alkali vapor introduction method from solid-state pill-like dispenser is presented as well. The technologies mentioned above are groundbreaking achievements that have allowed the building of the first European miniature atomic clock, and they are the basis for other solutions, including high-vacuum optical MEMS. Following description of the key technologies, high-vacuum self-pumping MEMS cell construction and preliminary measurement results are reported. This unique solution makes it possible to achieve a 10⁻⁶ Torr vacuum level inside the cell in the presence of saturated rubidium vapor, paving the way to building a new class of optical reference cells for atomic spectroscopy. Because the level of vacuum is high enough, experiments with cold atoms are potentially feasible. Full article

The acoustically-driven dynamics of isolated particle-like objects in microfluidic environments is a well-characterised phenomenon, which has been the subject of many studies. Conversely, very few acoustofluidic researchers looked at coated microbubbles, despite their widespread use in diagnostic imaging and the need for a precise characterisation of their acoustically-driven behaviour, underpinning therapeutic applications. The main reason is that microbubbles behave differently, due to their larger compressibility, exhibiting much stronger interactions with the unperturbed acoustic field (primary Bjerknes forces) or with other bubbles (secondary Bjerknes forces). In this paper, we study the translational dynamics of commercially-available polymer-coated microbubbles in a standing-wave acoustofluidic device. At increasing acoustic driving pressures, we measure acoustic forces on isolated bubbles, quantify bubble-bubble interaction forces during doublet formation and study the occurrence of sub-wavelength structures during aggregation. We present a dynamic characterisation of microbubble compressibility with acoustic pressure, highlighting a threshold pressure below which bubbles can be treated as uncoated. Thanks to benchmarking measurements under a scanning electron microscope, we interpret this threshold as the onset of buckling, providing a quantitative measurement of this parameter at the single-bubble level. For acoustofluidic applications, our results highlight the limitations of treating microbubbles as a special case of solid particles. Our findings will impact applications where knowing the buckling pressure of coated microbubbles has a key role, like diagnostics and drug delivery. Full article

Microcontrollers are programmable, integrated circuit chips. In the last two decades, their applications to industrial instruments, vehicles, and household appliances have reached the extent that microcontrollers are now the number-one selling electronic chip of all kinds. Simultaneously, the field of lab-on-a-chip research and technology has seen major technological leaps towards sample handling, sample preparation, and sensing for use in molecular diagnostic devices. Yet, the transformation from a laboratory based lab-on-a-chip technology to actual point-of-care device products has largely been limited to a fraction of the foreseen potential. We believe that increased knowledge of the vast possibilities that becomes available with open source microcontrollers, especially when embedded in easy-to-use development environments, such as the Arduino or Raspberry Pi, could potentially solve and even bridge the gap between lab-on-a-chip technology and real-life point of care applications. The profuse availability and extraordinary capabilities of microcontrollers, namely within computation, communication, and networking, combined with easy-to-use development environments, as well as a very active and fast moving community of makers, who are eager to share their knowledge, could potentially be the difference between a dreadful “chip-in-a-lab”-situation, and the next successful start-up. Here follows a brief insight into how open source microcontrollers could potentially have a transformative effect on the field of lab-on-a-chip research and technology. Details in some specific areas of application are briefly treated before addressing challenges and future perspectives. Full article

Micro electrochemical machining is becoming increasingly important in the microfabrication of metal parts. In this paper, the machining characteristics of micro electrochemical milling with nanosecond pulse were studied. Firstly, a mathematical model for the localization control of micro electrochemical milling with nanosecond pulse was established. Secondly, groups of experiments were conducted on nickel-based superalloy and the effects of parameters such as applied voltage, pulse on time, pulse period, electrolyte concentration and electrode diameter on machining localization and surface roughness were analyzed. Finally, by using the optimized machining parameters, some 2D complex shapes and 3D square cavity structures with good shape precision and good surface quality were successfully obtained. It was proved that the micro electrochemical milling with nanosecond pulse technique is an effective machining method to fabricate metal microstructures. Full article

Microbolometers arethe most common uncooled infrared techniques that allow 50 mK-temperature resolution to be achieved on-scene. However, this approach struggles with both self-heating, which is inherent to the resistive readout principle, and 1/f noise. We present an alternative approach that consists of using micro/nanoresonators vibrating according to a torsional mode, and whose resonant frequency changes with the incident IR-radiation. Dense arrays of such electromechanical structures were fabricated with a 12 µm pitch at low temperature, allowing their integration on complementary metal-oxide-semiconductor (CMOS) circuits according to a post-processing method. H-shape pixels with 9 µm-long nanorods and a cross-section of 250 nm × 30 nm were fabricated to provide large thermal responses, whose experimental measurements reached up to 1024 Hz/nW. These electromechanical resonators featured a noise equivalent power of 140 pW for a response time of less than 1 ms. To our knowledge, these performances are unrivaled with such small dimensions. We also showed that a temperature sensitivity of 20 mK within a 100 ms integration time is conceivable at a 12 µm pitch by co-integrating the resonators with their readout electronics, and suggesting a new readout scheme. This sensitivity could be reached short-term by depositing on top of the nanorods a vanadium oxide layer that had a phase-transition that could possibly enhance the thermal response by one order of magnitude. Full article

Optical imaging of cancer cells using near infrared (NIR) light is currently an active area of research, as this spectral region directly corresponds to the therapeutic window of biological tissues. Upconversion nanocrystals are photostable alternatives to conventional fluorophores. In our work, we have prepared upconversion nanocrystals of NaYF₄:Yb/Er and encapsulated them in silica to form core-shell structures. The as-prepared core-shell nanostructures have been characterized for their structure, morphology, and optical properties using X-ray diffraction, transmission electron microscopy coupled with elemental mapping, and upconversion luminescence spectroscopy, respectively. The cytotoxicity examined using cell viability assay indicated a low level of toxicity of these core-shell nanostructures. Finally, these core-shell nanostructures have been utilized as photostable probes for NIR light enabled optical imaging of human breast cancer cells. This work paves the way for the development of advanced photostable, biocompatible, low-toxic core-shell nanostructures for potential optical imaging of biological cells and tissues. Full article

Given the rapid miniaturization of technology, it is of interest to produce viable on-chip micro-electrochemical energy storage systems. In this study, interdigitated asymmetric microsupercapacitors were fabricated using photolithography, lift-off and electrodeposition methods. Manganese oxide (MnO_x) and reduced graphene oxide (rGO) comprised the pseudocapacitive and the double layer component, respectively. Symmetric MnO_x//MnO_x, rGO//rGO as well as asymmetric rGO//MnO_x microsupercapacitors with three different MnO_x thicknesses were constructed and characterized in aqueous media. The asymmetric microsupercapacitor with the intermediate MnO_x film thickness displayed the optimal energy-power trade-off superior to that of both the symmetric and well as the other asymmetric configurations. The optimal microsupercapacitor exhibited a high stack energy density of 1.02 mWh·cm⁻³ and a maximal power density of 3.44 W·cm⁻³. The high energy-power trade-off of the device is attributed to the synergistic effects of utilizing double layer and pseudocapacitive charge storage mechanisms along with in-plane interdigital microelectrode design within one optimized micro-device. Full article

A device to monitor particulate matter of size 2.5 μm (PM2.5) that has been designed and developed includes a surface-acoustic-wave sensor operating in a shear horizontal mode (SH-SAW) combined with a cyclone separator. In our tests, aerosols generated as incense smoke were first separated and sampled inside a designed cyclone separator; the sampled PM2.5 was then introduced into the sensing area of an SH-SAW sensor for detection. The use of microcentrifuge tubes as a cyclone separator effectively decreases the size and power consumption of the device; the SAW sensor in a well design and operating at 122 MHz was fabricated with MEMS techniques. After an explanation of the design of the cyclone separator, a simulation of the efficiency and the SAW sensor detection are discussed. A microcentrifuge tube (volume 0.2 mL, inlet and outlet diameters 0.5 mm) as a separator has separation cutoff diameters 50% (d₅₀) at 2.5 μm; the required rate of volumetric flow at the inlet is 0.125 LPM, according to simulation with computational fluid dynamics (CFD) software; the surface-acoustic-wave (SAW) sensor exhibits sensitivity approximately 9 Hz/ng; an experiment for PM2.5 detection conducted with the combined device shows a strong positive linear correlation with a commercial aerosol monitor. The limit of detection (LOD) is 11 μg/m³ with sample time 160 s and total detection duration about 5 min. Full article

There is growing awareness for the need of early diagnostic tools to aid in point-of-care testing in cancer. Tumor biopsy remains the conventional means in which to sample a tumor and often presents with challenges and associated risks. Therefore, alternative sources of tumor biomarkers is needed. Liquid biopsy has gained attention due to its non-invasive sampling of tumor tissue and ability to serially assess disease via a simple blood draw over the course of treatment. Among the leading technologies developing liquid biopsy solutions, microfluidics has recently come to the fore. Microfluidic platforms offer cellular separation and analysis platforms that allow for high throughout, high sensitivity and specificity, low sample volumes and reagent costs and precise liquid controlling capabilities. These characteristics make microfluidic technology a promising tool in separating and analyzing circulating tumor biomarkers for diagnosis, prognosis and monitoring. In this review, the characteristics of three kinds of circulating tumor markers will be described in the context of cancer, circulating tumor cells (CTCs), exosomes, and circulating tumor DNA (ctDNA). The review will focus on how the introduction of microfluidic technologies has improved the separation and analysis of these circulating tumor markers. Full article

An improved empirical large signal model for 0.1 µm AlGaN/GaN high electron mobility transistor (HEMT) process is proposed in this paper. The short channel effect including the drain induced barrier lowering (DIBL) effect and channel length modulation has been considered for the accurate description of DC characteristics. In-house AlGaN/GaN HEMTs with a gate-length of 0.1 μm and different dimensions have been employed to validate the accuracy of the large signal model. Good agreement has been achieved between the simulated and measured S parameters, I-V characteristics and large signal performance at 28 GHz. Furthermore, a monolithic microwave integrated circuit (MMIC) power amplifier from 92 GHz to 96 GHz has been designed for validation of the proposed model. Results show that the improved large signal model can be used up to W band. Full article