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Micromachines 2013, 4(1), 116-127; doi:10.3390/mi4010116
Article

Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors

* ,
,
 and
MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
* Author to whom correspondence should be addressed.
Received: 13 December 2012 / Revised: 7 March 2013 / Accepted: 8 March 2013 / Published: 19 March 2013
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Abstract

We presented an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.
Keywords: flow sensor; electrostatic spring softening; hair; cricket; biomimetics flow sensor; electrostatic spring softening; hair; cricket; biomimetics
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Droogendijk, H.; Bruinink, C.M.; Sanders, R.G.; Krijnen, G.J. Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors. Micromachines 2013, 4, 116-127.

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