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Micromachines 2013, 4(1), 22-33; doi:10.3390/mi4010022

Compact Mass Flow Meter Based on a Micro Coriolis Flow Sensor

1,* , 1
1 Bronkhorst High-Tech BV, 7261 AK Ruurlo, The Netherlands 2 Lionix BV, 7522 NH Enschede, The Netherlands 3 Micronit BV, 7521 PV Enschede, The Netherlands 4 Transducers Science and Technology, University of Twente, 7522 NH Enschede, The Netherlands
* Author to whom correspondence should be addressed.
Received: 17 December 2012 / Revised: 5 February 2013 / Accepted: 8 February 2013 / Published: 1 March 2013
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In this paper we demonstrate a compact ready-to-use micro Coriolis mass flow meter. The full scale flow is 1 g/h (for water at a pressure drop < 1 bar). It has a zero stability of 2 mg/h and an accuracy of 0.5% reading for both liquids and gases. The temperature drift between 10 and 50 °C is below 1 mg/h/°C. The meter is robust, has standard fluidic connections and can be read out by means of a PC or laptop via USB. Its performance was tested for several common gases (hydrogen, helium, nitrogen, argon and air) and liquids (water and isopropanol). As in all Coriolis mass flow meters, the meter is also able to measure the actual density of the medium flowing through the tube. The sensitivity of the measured density is ~1 Hz.m3/kg.
Keywords: mass flow meter; Coriolis; microfluidics mass flow meter; Coriolis; microfluidics
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Sparreboom, W.; van de Geest, J.; Katerberg, M.; Postma, F.; Haneveld, J.; Groenesteijn, J.; Lammerink, T.; Wiegerink, R.; Lötters, J. Compact Mass Flow Meter Based on a Micro Coriolis Flow Sensor. Micromachines 2013, 4, 22-33.

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