A Dual-Mass Resonant MEMS Gyroscope Design with Electrostatic Tuning for Frequency Mismatch Compensation
Round 1
Reviewer 1 Report
This paper describes a new structurally and thermally stable design for the mode-match z-axis gyroscope and uses the stiffness softening effect to modify the mode-frequency shifts. There is not much innovation in this article. In theory, dual-mass resonant MEMS gyroscopes and the use of electrostatic tuning for frequency mismatch compensation are both mature technologies. It would be better if this article can realize the fabrication of the sensor, measure its characteristics, and discuss the difference between simulation and measurement results.
For this article, I have the following questions to ask the authors.
1.
Can the variables in Table 1 also be marked in Figure 1? Is the drive tuning comb pairs (Nt) used to tune for frequency mismatch? How is it arranged in the sensing plate pairs (Ns)?
If the structure sense gap is 3um, there is no need to indicate the smaller and larger sense gap (d1, d2).
2.
Formulas 3 and 4 apply to a single fixed-guided beam. Since FEM analysis has been used for mode shapes, please also compare and discuss the theoretical formulas of elastic coefficients (kx and ky) obtained by finite element simulation.
3.
This article does not discuss the frequency offset caused by the process uncertainty. If the frequency of the sense axis is lower than the drive axis due to the process offset, the stiffness softening effect of the sense axis cannot be used for frequency compensation. So how to achieve mode match, is there any other compensation mechanism?
4.
The quality factors of Figure 7 and Figure 8 are quite high. If the capacitive gyroscope is operated in an air environment, it is usually impossible to obtain such a high quality factor. What is the vacuum level corresponding to the FEM simulation? Is there a mechanism to reduce the structural anchor loss?
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Author Response
we uploaded the responses to the reviewer in the attached file
and made corrections in the uploaded article
Author Response File: Author Response.pdf
Reviewer 2 Report
This paper represents a dual-mass resonant MEMS gyroscope with frequency mismatch compensation. The main contribution is that the authors shown many ANSYS analysis results such as the eigen frequencies, resonant frequency, tuning voltage by FEM simulations. The quality of this study is good. But they lost some quantitative data and key techniques of academic research is unfortunate. This paper presented not clear for some key points. The paper should be revised for resubmission.
- In the abstract, the authors should make brief introduction about the representative key technologies from these devices.
- In this article, what are the key quantitative data, measurement time, the size of target or various sensing objects?
- Is there any actual product produced for MEMS gyroscope? What is the real product-related data? In this study, what are the advantages of the device in this research?
- In this research, can this model be manufactured?
Author Response
we uploaded the responses to the reviewer in the attached file
and made corrections in the uploaded article
Author Response File: Author Response.pdf
Round 2
Reviewer 2 Report
This article can be accepted by Applied Sciences.
