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Resonant Based MEMS Sensors for Analyte Detection, Concentration Measurements and Environmental Monitoring

A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".

Deadline for manuscript submissions: closed (30 May 2022) | Viewed by 6659

Special Issue Editors


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Guest Editor
KU Leuven, 3000 Leuven, Belgium
Interests: micro- and nanosystems and sensors; fabrication process development; physical MEMS sensors; bio-chemical MEMS sensors; resonators
Special Issues, Collections and Topics in MDPI journals
Department of Electrical Engineering, University of Leuven, 3001 Leuven, Belgium
Interests: MEMS inertial sensors; MEMS pressure sensors ; novel optimization and design methods for MEMS devices

Special Issue Information

Dear Colleagues,

Most current biosensors for analyte detection and concentration measurements are based on optical read-out techniques and/or require labeling techniques, often leading to complicated interface systems that make them unsuitable for low-cost applications. Recent developments in micro- or nanoscale resonant sensors are promising to overcome these issues, e.g., based on acoustic wave sensors, coupled resonators, thermo-piezoresistive actuation sensing techniques, new types of quartz crystal microbalances, high-sensitivity gravimetric resonators, etc. They have in common that they offer a solution to the problem that conventional resonant sensors typically require operation in vacuum environment to achieve sufficiently high-quality factors that are of limited use for direct application for biosensing.

This call for papers invites technical contributions to the Sensors Special Issue on “Resonant Based Bio-MEMS Sensors for Analyte Detection and Concentration Measurements”. This Special Issue aims to provide an up-to-date overview of resonant biosensors that can be used in direct contact with the medium that the bioanalyte to-be-sensed is in, their theory, and their solutions, as well as a forum for sharing innovative approaches and applications. Potential topics include but are not limited to the following:

  • Acoustic wave biosensors;
  • Coupled resonator sensors;
  • Biosensors based on piezoelectric resonators;
  • High-Q resonator sensors;
  • Quartz crystal microbalances for biosensing;
  • Gravimetric biosensors;
  • Nanoscale resonators.

Prof. Dr. Michael Kraft
Guest Editor

Manuscript Submission Information

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Published Papers (2 papers)

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Research

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23 pages, 9559 KiB  
Article
Towards Portable MEMS Oscillators for Sensing Nanoparticles
by Malar Chellasivalingam, Arthur T. Zielinski, Thomas S. Whitney, Adam M. Boies and Ashwin A. Seshia
Sensors 2022, 22(15), 5485; https://doi.org/10.3390/s22155485 - 22 Jul 2022
Cited by 2 | Viewed by 1970
Abstract
This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approximately 5.999 MHz are employed for sensing 50 nm size-selected silver [...] Read more.
This paper reports on the design, and implementation of piezoelectric-on-silicon MEMS resonators installed within a portable experimental setup for sensing nanoparticles in a laboratory environment. MEMS oscillators with a center frequency of approximately 5.999 MHz are employed for sensing 50 nm size-selected silver nanoparticles generated in the laboratory. The same experimental setup is then assembled to sense indoor particles that are present in the laboratory environment. The challenges associated with particle deposition as a result of assembling the portable experimental setup is highlighted. Furthermore, the MEMS oscillators demonstrate that the total mass of silver nanoparticles deposited onto the MEMS resonator surface using the inertial impaction technique-based experimental setup is approximately 7.993 nanograms. The total indoor particle mass accumulated on the MEMS resonator surface is estimated to be approximately 1.732 nanograms and 26.9 picograms for two different runs. The frequency resolution of the MEMS oscillator is estimated to be approximately 32 ppb and, consequently, the minimum detectable particle mass is approximately 60 femtograms for a 9.2 s integration time. Full article
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Review

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32 pages, 11748 KiB  
Review
A Review on Coupled Bulk Acoustic Wave MEMS Resonators
by Linlin Wang, Chen Wang, Yuan Wang, Aojie Quan, Masoumeh Keshavarz, Bernardo Pereira Madeira, Hemin Zhang, Chenxi Wang and Michael Kraft
Sensors 2022, 22(10), 3857; https://doi.org/10.3390/s22103857 - 19 May 2022
Cited by 13 | Viewed by 4059
Abstract
With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, [...] Read more.
With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented. Full article
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