Open AccessArticle
An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging
by
Yi Yang 1,2, He Tian 1,2, Yu-Feng Wang 1,2, Yi Shu 1,2, Chang-Jian Zhou 1,2, Hui Sun 1,2, Cang-Hai Zhang 1,2, Hao Chen 1,2 and Tian-Ling Ren 1,2,*
1
Institute of Microelectronics, Tsinghua University, Beijing 100084, China
2
Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China
Cited by 53 | Viewed by 12592
Abstract
A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high
[...] Read more.
A ~1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density using a relatively simple process. Accordingly, key fabrication processes such as thick piezoelectric film deposition, low-stress Si-SOI bonding and bulk silicon removal have been successfully developed. The novel fine-pitch 6 × 6 pMUT arrays can all work at the desired frequency (~1 MHz) with good uniformity, high performance and potential IC integration compatibility. The minimum interspace is ~20 μm, the smallest that has ever been achieved to the best of our knowledge. These arrays can be potentially used to steer ultrasound beams and implement high quality 3-D medical imaging applications.
Full article
►▼
Show Figures