Integrated Optical Waveguide Electric Field Sensors Based on Bismuth Germanate
Abstract
:1. Introduction
2. The Working Principle of an Integrated Optoelectronic Field Sensor
2.1. Electro-Optic Effect of BGO Crystal
2.2. Principle and Design of Integrated Optical Electric Field Sensor
3. Optical Waveguide Writing Experiment
3.1. Experiment Platform
3.2. Writing Experiments at 1 kHz~200 kHz Repeat Frequency
3.3. In Situ Refractive Index Characterization Experiment
4. Design and Fabrication of Antennas and Electrodes
4.1. Analysis of Structural Parameters of Antennas and Electrodes
4.2. Antenna Electrode Process Scheme
4.3. Electro-Optic Effect Measurement
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
References
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repetition frequency: 1 kHz | |
0.5 mm/s | |
repetition frequency: 10 kHz | |
0.5 mm/s | |
2 mm/s | |
repetition frequency: 100 kHz | |
0.5 mm/s | |
2 mm/s |
Repetition Frequency | Scan Speed | Depth | Average Power | Top View of Waveguide Topography |
---|---|---|---|---|
1 kHz | 0.5 mm/s | 60 μm | 2.27 mw | |
110 μm | ||||
10 kHz | 0.5 mm/s | 60 μm | 0.71 mw | |
44 mw | ||||
100 kHz | 2 mm/s | 60 μm | 6.21 mw |
repetition frequency: 100 kHz | ||
0.1 mm/s | 2 mm/s | 3 mm/s |
repetition frequency: 200 kHz | ||
0.1 mm/s | 2 mm/s | 3 mm/s |
End View | Top View | |
---|---|---|
2 μm | ||
1 μm |
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Wang, J.; Song, Y.; Song, X.; Zhang, W.; Yang, J.; Xuan, Z. Integrated Optical Waveguide Electric Field Sensors Based on Bismuth Germanate. Sensors 2024, 24, 5570. https://doi.org/10.3390/s24175570
Wang J, Song Y, Song X, Zhang W, Yang J, Xuan Z. Integrated Optical Waveguide Electric Field Sensors Based on Bismuth Germanate. Sensors. 2024; 24(17):5570. https://doi.org/10.3390/s24175570
Chicago/Turabian StyleWang, Jin, Yilin Song, Xuefei Song, Wei Zhang, Junqi Yang, and Zhi Xuan. 2024. "Integrated Optical Waveguide Electric Field Sensors Based on Bismuth Germanate" Sensors 24, no. 17: 5570. https://doi.org/10.3390/s24175570