All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

Kang, Eunmo; Choi, Heejoo; Hellman, Brandon; Rodriguez, Joshua; Smith, Braden; Deng, Xianyue; Liu, Parker; Lee, Ted Liang-Tai; Evans, Eric; Hong, Yifan; Guan, Jiafan; Luo, Chuan; Takashima, Yuzuru

doi:10.3390/mi13091444

Open AccessFeature PaperEditor’s ChoiceArticle

All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

by

Eunmo Kang

,

Heejoo Choi

,

Brandon Hellman

,

Joshua Rodriguez

,

Braden Smith

,

Xianyue Deng

,

Parker Liu

,

Ted Liang-Tai Lee

,

Eric Evans

,

Yifan Hong

,

Jiafan Guan

,

Chuan Luo

and

Yuzuru Takashima

^*

James C. Wyant College of Optical Science, University of Arizona, Tucson, AZ 85719, USA

^*

Author to whom correspondence should be addressed.

Micromachines 2022, 13(9), 1444; https://doi.org/10.3390/mi13091444

Submission received: 14 August 2022 / Revised: 26 August 2022 / Accepted: 29 August 2022 / Published: 1 September 2022

(This article belongs to the Special Issue Beam Steering via Arrayed Micromachines)

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Abstract

In a lidar system, replacing moving components with solid-state devices is highly anticipated to make a reliable and compact lidar system, provided that a substantially large beam area with a large angular extent as well as high angular resolution is assured for the lidar transmitter and receiver. A new quasi-solid-state lidar optical architecture employs a transmitter with a two-dimensional MEMS mirror for fine beam steering at a fraction of the degree of the angular resolution and is combined with a digital micromirror device for wide FOV scanning over 37 degree while sustaining a large aperture area of 140 mm squared. In the receiver, a second digital micromirror device is synchronized to the transmitter DMD, which enables a large FOV receiver. An angular resolution of

0.57 ° (H)

by

0.23 ° (V)

was achieved with 0.588 fps for scanning 1344 points within the field of view.

Keywords: lidar; MEMS; digital micromirror device; MEMS mirror; time-of-flight; solid-state lidar

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MDPI and ACS Style

Kang, E.; Choi, H.; Hellman, B.; Rodriguez, J.; Smith, B.; Deng, X.; Liu, P.; Lee, T.L.-T.; Evans, E.; Hong, Y.; et al. All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror. Micromachines 2022, 13, 1444. https://doi.org/10.3390/mi13091444

AMA Style

Kang E, Choi H, Hellman B, Rodriguez J, Smith B, Deng X, Liu P, Lee TL-T, Evans E, Hong Y, et al. All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror. Micromachines. 2022; 13(9):1444. https://doi.org/10.3390/mi13091444

Chicago/Turabian Style

Kang, Eunmo, Heejoo Choi, Brandon Hellman, Joshua Rodriguez, Braden Smith, Xianyue Deng, Parker Liu, Ted Liang-Tai Lee, Eric Evans, Yifan Hong, and et al. 2022. "All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror" Micromachines 13, no. 9: 1444. https://doi.org/10.3390/mi13091444

APA Style

Kang, E., Choi, H., Hellman, B., Rodriguez, J., Smith, B., Deng, X., Liu, P., Lee, T. L.-T., Evans, E., Hong, Y., Guan, J., Luo, C., & Takashima, Y. (2022). All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror. Micromachines, 13(9), 1444. https://doi.org/10.3390/mi13091444

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All-MEMS Lidar Using Hybrid Optical Architecture with Digital Micromirror Devices and a 2D-MEMS Mirror

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