Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis
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Jung, H.-I.; Son, C.-H.; Lee, J.-H. Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis. Energies 2024, 17, 4969. https://doi.org/10.3390/en17194969
Jung H-I, Son C-H, Lee J-H. Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis. Energies. 2024; 17(19):4969. https://doi.org/10.3390/en17194969
Chicago/Turabian StyleJung, Hye-In, Chang-Hyo Son, and Joon-Hyuk Lee. 2024. "Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis" Energies 17, no. 19: 4969. https://doi.org/10.3390/en17194969