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Journal: Energies, 2024
Volume: 17
Number: 4969
Article:
Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis
Authors:
by
Hye-In Jung, Chang-Hyo Son and Joon-Hyuk Lee
Link:
https://www.mdpi.com/1996-1073/17/19/4969
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