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Journal: Materials, 2019
Volume: 12
Number: 3362
Article:
Laser Annealing of P and Al Implanted 4H-SiC Epitaxial Layers
Authors:
by
Cristiano Calabretta, Marta Agati, Massimo Zimbone, Simona Boninelli, Andrea Castiello, Alessandro Pecora, Guglielmo Fortunato, Lucia Calcagno, Lorenzo Torrisi and Francesco La Via
Link:
https://www.mdpi.com/1996-1944/12/20/3362
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