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Journal: Materials, 2021
Volume: 14
Number: 4400
4400
Article: Effect of Nitrogen and Aluminum Doping on 3C-SiC Heteroepitaxial Layers Grown on 4° Off-Axis Si (100)
Authors: by Cristiano Calabretta, Viviana Scuderi, Ruggero Anzalone, Marco Mauceri, Danilo Crippa, Annalisa Cannizzaro, Simona Boninelli and Francesco La Via
Link: https://www.mdpi.com/1996-1944/14/16/4400

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