Titanium Nitride as a Plasmonic Material from Near-Ultraviolet to Very-Long-Wavelength Infrared Range
Abstract
:1. Introduction
2. Materials, Methods and Models
2.1. Magnetron Sputtering
2.2. SIMS
2.3. XRD
2.4. Raman Spectroscopy
2.5. Optical Properties and Models
2.6. Ab Initio Calculations
3. Results
3.1. Structural Properties
3.2. Optical Properties in the UV-VIS Range
3.3. Optical Properties in the Infrared Range
3.4. Ab Initio Calculations
3.5. Raman Measurements
4. Conclusions
Supplementary Materials
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Conflicts of Interest
Abbreviations
AFM | Atomic Force Microscopy |
CMOS | Complementary Metal-Oxide-Semiconductor |
DFT | Density Functional Theory |
EDS | Energy-dispersive X-ray spectroscopy |
FTIR | Fourier transform infrared (spectroscopy) |
GGA | Generalized Gradient Approximation |
GIXRD | Grazing Incidence X-ray Diffraction |
LO | Longitudinal Optical (phonon) |
PBE | Perdew-Burke-Ernzerhof (parametrization) |
RMS | Root-Mean-Square |
RPA | Random-Phase Approximation |
SEM | Scanning Electron Microscopy |
SERS | Surface-Enhanced Raman Spectroscopy |
SIMS | Secondary Ion Mass Spectroscopy |
TO | Transverse Optical (phonon) |
UV | Ultra-violet (spectral range) |
VASE | Variable-Angle Spectroscopic Ellipsometry |
VIS | Visible (spectral range) |
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# | d (nm) | RMS (nm) | λ@ε1 = 0 (nm) | x in TiNx − | a0 (nm) |
---|---|---|---|---|---|
1 | 151 | 1.02 | 608.0 ± 0.5 | 1.21 ± 0.02 | 0.4260 |
2 | 169 | 0.99 | 572.5 ± 0.5 | 1.16 ± 0.02 | 0.4255 |
3 | 188 | 0.99 | 537.0 ± 0.5 | 1.10 ± 0.01 | 0.4263 |
4 | 230 | 0.96 | 501.0 ± 0.5 | 1.04 ± 0.01 | 0.4280 |
5 | 415 | 2.42 | 479.0 ± 0.5 | 0.99 ± 0.01 | 0.4234 |
6 | 515 | 2.43 | 428.5 ± 0.5 | 0.93 ± 0.02 | 0.4230 |
7 | 542 | 2.46 | 392.5 ± 0.5 | 0.84 ± 0.03 | 0.4220 |
Sample 1 | Sample 2 | Sample 3 | Sample 4 | Sample 5 | Sample 6 | Sample 7 | |
---|---|---|---|---|---|---|---|
(eV) | 6.61 | 6.73 | 6.80 | 6.82 | 6.30 | 7.42 | 8.22 |
(eV) | 0.66 | 0.63 | 0.61 | 0.57 | 0.71 | 0.91 | 1.30 |
f1 | 0.16 | 0.07 | 0.81 | 1.07 | 0.15 | 0.45 | 0.64 |
(eV) | 2.39 | 2.30 | 2.30 | 2.15 | 2.16 | 2.17 | 2.22 |
(eV) | 0.93 | 0.70 | 1.97 | 1.90 | 0.68 | 1.09 | 1.41 |
f2 | 0.63 | 0.26 | 0.54 | 0.56 | 0.56 | 0.28 | - |
(eV) | 3.49 | 3.51 | 3.60 | 3.67 | 3.68 | 3.85 | - |
(eV) | 1.49 | 1.07 | 1.36 | 1.34 | 1.20 | 1.63 | - |
f3 | 5.53 | 6.40 | 2.99 | 2.61 | 2.12 | 2.44 | 1.62 |
(eV) | 5.54 | 5.84 | 5.19 | 5.20 | 5.16 | 5.34 | 5.07 |
(eV) | 4.73 | 5.44 | 3.27 | 2.86 | 2.41 | 2.85 | 2.62 |
f4 | 0.31 | 0.04 | 2.03 | 1.89 | 1.50 | 1.42 | 2.00 |
(eV) | 6.68 | 6.47 | 6.76 | 6.56 | 6.43 | 6.76 | 6.63 |
(eV) | 1.70 | 0.72 | 3.68 | 3.01 | 2.43 | 2.88 | 3.57 |
Sample 1 | Sample 2 | Sample 3 | Sample 4 | Sample 5 | Sample 6 | Sample 7 | |
---|---|---|---|---|---|---|---|
(eV) | 6.45 | 6.40 | 6.57 | 6.70 | 6.10 | 7.13 | 8.10 |
(eV) | 0.71 | 0.57 | 0.58 | 0.47 | 0.35 | 0.68 | 1.19 |
(eV) | - | - | 1.32 | 2.41 | 4.97 | 2.07 | 0.93 |
(eV) | - | - | 0.065 | 0.065 | 0.061 | 0.070 | 0.075 |
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Judek, J.; Wróbel, P.; Michałowski, P.P.; Ożga, M.; Witkowski, B.; Seweryn, A.; Struzik, M.; Jastrzębski, C.; Zberecki, K. Titanium Nitride as a Plasmonic Material from Near-Ultraviolet to Very-Long-Wavelength Infrared Range. Materials 2021, 14, 7095. https://doi.org/10.3390/ma14227095
Judek J, Wróbel P, Michałowski PP, Ożga M, Witkowski B, Seweryn A, Struzik M, Jastrzębski C, Zberecki K. Titanium Nitride as a Plasmonic Material from Near-Ultraviolet to Very-Long-Wavelength Infrared Range. Materials. 2021; 14(22):7095. https://doi.org/10.3390/ma14227095
Chicago/Turabian StyleJudek, Jarosław, Piotr Wróbel, Paweł Piotr Michałowski, Monika Ożga, Bartłomiej Witkowski, Aleksandra Seweryn, Michał Struzik, Cezariusz Jastrzębski, and Krzysztof Zberecki. 2021. "Titanium Nitride as a Plasmonic Material from Near-Ultraviolet to Very-Long-Wavelength Infrared Range" Materials 14, no. 22: 7095. https://doi.org/10.3390/ma14227095
APA StyleJudek, J., Wróbel, P., Michałowski, P. P., Ożga, M., Witkowski, B., Seweryn, A., Struzik, M., Jastrzębski, C., & Zberecki, K. (2021). Titanium Nitride as a Plasmonic Material from Near-Ultraviolet to Very-Long-Wavelength Infrared Range. Materials, 14(22), 7095. https://doi.org/10.3390/ma14227095