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Journal: MaterialsVolume: 15Number: 7770
Article: Study on the Deposition Uniformity of Triple-Target Magnetron Co-Sputtering System: Numerical Simulation and Experiment
  • Authors:
  • Guo Zhu1,*,
  • Baijun Xiao1 and
  • Zhiyin Gan2
  • et al.
Link: https://www.mdpi.com/1996-1944/15/21/7770

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