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Journal: Materials, 2023
Volume: 16
Number: 3824
Article:
Impact of Doping on Cross-Sectional Stress Assessment of 3C-SiC/Si Heteroepitaxy
Authors:
by
Viviana Scuderi, Marcin Zielinski and Francesco La Via
Link:
https://www.mdpi.com/1996-1944/16/10/3824
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