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Journal: MaterialsVolume: 16Number: 7405
Article: XPS Investigation of the Oxidation States of the As-Deposited Ta Films Prepared by Magnetron Sputtering Technology
  • Authors:
  • Ming Hu 1,2,*,
  • Zhaowang Li 1,2 and
  • Desheng Wang 1,2,*
  • et al.
Link: https://www.mdpi.com/1996-1944/16/23/7405

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