The Effects of Friction and Temperature in the Chemical–Mechanical Planarization Process
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Ilie, F.; Minea, I.-L.; Cotici, C.D.; Hristache, A.-F. The Effects of Friction and Temperature in the Chemical–Mechanical Planarization Process. Materials 2023, 16, 2550. https://doi.org/10.3390/ma16072550
Ilie F, Minea I-L, Cotici CD, Hristache A-F. The Effects of Friction and Temperature in the Chemical–Mechanical Planarization Process. Materials. 2023; 16(7):2550. https://doi.org/10.3390/ma16072550
Chicago/Turabian StyleIlie, Filip, Ileana-Liliana Minea, Constantin Daniel Cotici, and Andrei-Florin Hristache. 2023. "The Effects of Friction and Temperature in the Chemical–Mechanical Planarization Process" Materials 16, no. 7: 2550. https://doi.org/10.3390/ma16072550
APA StyleIlie, F., Minea, I.-L., Cotici, C. D., & Hristache, A.-F. (2023). The Effects of Friction and Temperature in the Chemical–Mechanical Planarization Process. Materials, 16(7), 2550. https://doi.org/10.3390/ma16072550