Elsaka, B.; Yang, X.; Kästner, P.; Dingel, K.; Sick, B.; Lehmann, P.; Buhmann, S.Y.; Hillmer, H.
Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review. Materials 2024, 17, 3393.
https://doi.org/10.3390/ma17143393
AMA Style
Elsaka B, Yang X, Kästner P, Dingel K, Sick B, Lehmann P, Buhmann SY, Hillmer H.
Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review. Materials. 2024; 17(14):3393.
https://doi.org/10.3390/ma17143393
Chicago/Turabian Style
Elsaka, Basma, Xiaohui Yang, Philipp Kästner, Kristina Dingel, Bernhard Sick, Peter Lehmann, Stefan Yoshi Buhmann, and Hartmut Hillmer.
2024. "Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review" Materials 17, no. 14: 3393.
https://doi.org/10.3390/ma17143393
APA Style
Elsaka, B., Yang, X., Kästner, P., Dingel, K., Sick, B., Lehmann, P., Buhmann, S. Y., & Hillmer, H.
(2024). Casimir Effect in MEMS: Materials, Geometries, and Metrologies—A Review. Materials, 17(14), 3393.
https://doi.org/10.3390/ma17143393