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Journal: Materials, 2025
Volume: 18
Number: 1895
Article:
Influence of Deposition Temperature on Microstructure and Properties of Tantalum Oxide Sputtered Coatings
Authors:
by
Maria P. Nikolova and Iliyan Tzvetkov
Link:
https://www.mdpi.com/1996-1944/18/9/1895
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