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Journal: Micromachines, 2019
Volume: 10
Number: 380

Article: A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process
Authors: by Kang Rao, Xiaoli Wei, Shaolin Zhang, Mengqi Zhang, Chenyuan Hu, Huafeng Liu and Liang-Cheng Tu
Link: https://www.mdpi.com/2072-666X/10/6/380

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