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Journal: Micromachines, 2020
Volume: 11
Number: 836
Article:
Broadband Lumped-Element Parameter Extraction Method of Two-Port 3D MEMS In-Chip Solenoid Inductors Based on a Physics-Based Equivalent Circuit Model
Authors:
by
Jiamian Sun, Haiwang Li, Sifan Wu, Tiantong Xu, Hanqing Li, Hanxiao Wu and Shuangzhi Xia
Link:
https://www.mdpi.com/2072-666X/11/9/836
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