Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si
Abstract
:1. Introduction
2. Simulation Methodology and Device Structure
2.1. Simulation Methodology
2.2. Model Description
2.3. Material Parameters in the Model
2.4. Setting of Boundary Conditions
3. Performance Impact Analysis
3.1. Modal Analysis
3.2. Analysis of Surface Acoustic Wave Propagation Characteristics
3.2.1. Effects of Electrode Film Thickness on SAW Propagation Characteristics
3.2.2. Effects of Piezoelectric Layer Thickness on SAW Propagation Characteristics
3.2.3. Effects of Temperature Compensation Layer Thickness on SAW Propagation Characteristics
3.3. Transient and S Parameter Analysis
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Unit Element | ||||||||
---|---|---|---|---|---|---|---|---|
value | 6 | 3 | 1.5 | 0.1–1 | 3 | 6 | 0.1–0.5 | 0.1–1 |
LCRF | W | NG | NI | NOUT | ||||
value | 6 | 3 | 1.5 | 12 | 5 | 4 |
Item | Symbol | LiNbO3 | Diamond | Si | Al | SiO2 |
---|---|---|---|---|---|---|
Density (Kg/m3) | 4700 | 3515 | 2329 | 2695 | 2200 | |
elasticity matrix (GPa) | 203 | 1158 | 166 | 111 | 78.5 | |
70.72 | 85 | 64 | 61 | 16.1 | ||
57.9 | 85 | 64 | 61 | 16.1 | ||
222.1 | 1158 | 166 | 111 | 78.5 | ||
75.8 | 537 | 79.5 | 25 | 31.2 | ||
piezoelectric constant (C/m2) | 4.455 | - | - | - | ||
1.692 | - | - | - | |||
2.322 | - | - | - | |||
dielectric constant (10−11 F/m) | 43.6 | - | 11.8 | - | 3.32 | |
34.65 | - | 11.8 | - | 3.32 | ||
Temperature coefficients of elastic constants (10−4/°C) | −1.74 | −0.14 | −0.53 | −5.9 | 2.39 | |
−1.59 | −0.57 | −0.75 | −0.8 | 5.84 | ||
−1.53 | −0.14 | −0.53 | −5.9 | 2.39 | ||
−2.04 | −0.125 | −0.42 | −5.2 | 1.51 | ||
Temperature coefficients of mass density (10−6/°C) | - | −3.6 | - | −1.65 | −54 |
Boundary | Mechanical Boundary Conditions | Electrical Boundary Conditions |
---|---|---|
Γ6, Γ7 | Free boundary | Potential/Grounding |
Γ1, Γ2, Γ3, Γ5 | Free boundary | Continuity |
Γ4 | Fixed constraint | Grounding |
ΓL, ΓR | Periodic conditions |
Ref | Substrate | f0 (GHz) | Vp (km/s) | TCF (ppm/°C) | |
---|---|---|---|---|---|
[27] | LiNbO3/SiO2/SiC | 1.28 | 2.78 | 22% | −63.8 |
[28] | LiNbO3/SiO2/Si | 1.28 | 3.5 | 25% | −57.7 |
[26] | AlN/diamond | 10 | 10 | 0.2% | / |
[29] | TeO3/SiC/LiNbO3 | / | 4.39 | 9.7% | TCD:0–60 |
[30] | LiNbO3/diamo-nd/Si | / | 12.4 | 4.8% | / |
This work | SiO2/IDT/LiNbO3/diamond/Si | ≥1 | ≥9 | 6.5% | 0 |
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Zhang, H.; Wang, H. Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si. Micromachines 2021, 12, 1286. https://doi.org/10.3390/mi12111286
Zhang H, Wang H. Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si. Micromachines. 2021; 12(11):1286. https://doi.org/10.3390/mi12111286
Chicago/Turabian StyleZhang, Hanqiang, and Hongliang Wang. 2021. "Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si" Micromachines 12, no. 11: 1286. https://doi.org/10.3390/mi12111286