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Journal: Micromachines, 2022
Volume: 13
Number: 1629

Article: Characterization of Ferroelectric Al0.7Sc0.3N Thin Film on Pt and Mo Electrodes
Authors: by Ran Nie, Shuai Shao, Zhifang Luo, Xiaoxu Kang and Tao Wu
Link: https://www.mdpi.com/2072-666X/13/10/1629

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