Article Versions Notes

Wei H, Geng W, Bi K, Li T, Li X, Qiao X, Shi Y, Zhang H, Zhao C, Xue G, et al. High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO₃ Single-Crystal Cantilever Beams. Micromachines. 2022; 13(2):329. https://doi.org/10.3390/mi13020329

Wei, Huifen, Wenping Geng, Kaixi Bi, Tao Li, Xiangmeng Li, Xiaojun Qiao, Yikun Shi, Huiyi Zhang, Caiqin Zhao, Gang Xue, and et al. 2022. "High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO₃ Single-Crystal Cantilever Beams" Micromachines 13, no. 2: 329. https://doi.org/10.3390/mi13020329

Wei, H., Geng, W., Bi, K., Li, T., Li, X., Qiao, X., Shi, Y., Zhang, H., Zhao, C., Xue, G., & Chou, X. (2022). High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO₃ Single-Crystal Cantilever Beams. Micromachines, 13(2), 329. https://doi.org/10.3390/mi13020329