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Journal: Micromachines, 2022
Volume: 13
Number: 742
Article:
Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS
Authors:
by
Mani Teja Bodduluri, Björn Gojdka, Niklas Wolff, Lorenz Kienle, Thomas Lisec and Fabian Lofink
Link:
https://www.mdpi.com/2072-666X/13/5/742
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