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Micromachines, Volume 13, Issue 5

2022 May - 172 articles

Cover Story: With the recent advancements in microfabrication, researchers have revisited magnetorheological micropump designs. In this study, Rubayet et al. propose a magnetorheological micropump featuring a duckbill valve. The proposed design can pump 2.45 µL of fluid during the first second and minimizes the backflow by nearly 7.5 times compared to a model without a valve. The reported model could potentially be used in a broad range of applications, such as an insulin dosing system for type 1 diabetic patients, artificial organs to transport blood, organ-on-chip applications, and so on. View this paper
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Articles (172)

  • Article
  • Open Access
6 Citations
2,547 Views
15 Pages

Dynamic Characteristics and Experimental Research of Linear-Arch Bi-Stable Piezoelectric Energy Harvester

  • Xuhui Zhang,
  • Fulin Zhu,
  • Luyang Chen,
  • Xiaoyu Chen,
  • Yan Guo and
  • Hengtao Xu

Collecting vibration energy in the environment is expected to solve the problem of the self-power supply of wireless monitoring nodes in underground coal mines. By introducing nonlinear factors, a linear-arch bi-stable piezoelectric energy harvester...

  • Article
  • Open Access
9 Citations
3,808 Views
20 Pages

The piezoelectric injection-system provides a reliable approach for precise small-quantity fuel injection due to its fast, dynamic response. Considering the nonlinearity of a piezoelectric actuator, the complete electro-mechanical-hydraulic model of...

  • Article
  • Open Access
5 Citations
4,088 Views
17 Pages

Infrared Transmission Characteristics of Phase Transitioning VO2 on Various Substrates

  • Samee Azad,
  • Durga Gajula,
  • Nawraj Sapkota,
  • Apparao Rao and
  • Goutam Koley

Infrared transmission characteristics of VO2 thin films synthesized on multiple substrates, using a low-pressure direct oxidation technique, have been characterized. Material characterization of these films indicates high material quality, which resu...

  • Communication
  • Open Access
5 Citations
2,404 Views
8 Pages

Wavelength Modulation Characteristics of Metal Gratings on Si-Based Blocked-Impurity-Band (BIB) Terahertz Detectors

  • Yulu Chen,
  • Zuoru Dong,
  • Yangzhou Zhou,
  • Jiajia Tao,
  • Wulin Tong,
  • Yifei Wu,
  • Wenhui Liu,
  • Bingbing Wang,
  • Xiaowan Dai and
  • Xiaodong Wang

In this work, the wavelength selection characteristics of metal gratings on Si-based blocked-impurity-band (BIB) detectors in the terahertz band were studied by performing experiments and a finite difference time domain (FDTD) simulation. The transmi...

  • Article
  • Open Access
5 Citations
2,489 Views
23 Pages

Avoiding chatter in milling processes is critical for obtaining machined parts with high surface quality. In this paper, we propose two methods for predicting the milling stability based on the composite Cotes and Simpson’s 3/8 formulas. First,...

  • Article
  • Open Access
1 Citations
2,872 Views
13 Pages

A 66–76 GHz Wide Dynamic Range GaAs Transceiver for Channel Emulator Application

  • Peigen Zhou,
  • Chen Wang,
  • Jin Sun,
  • Zhe Chen,
  • Jixin Chen and
  • Wei Hong

In this study, we developed a single-channel channel emulator module with an operating frequency covering 66–67 GHz, including a 66–76 GHz wide dynamic range monolithic integrated circuit designed based on 0.1 µm pHEMT GaAs process,...

  • Article
  • Open Access
5 Citations
3,209 Views
10 Pages

Investigation of Negative Bias Temperature Instability Effect in Nano PDSOI PMOSFET

  • Yafang Yang,
  • Hongxia Liu,
  • Kun Yang,
  • Zihou Gao and
  • Zixu Liu

The Negative Bias Temperature Instability (NBTI) effect of partially depleted silicon-on-insulator (PDSOI) PMOSFET based on 130 nm is investigated. First, the effect of NBTI on the IV characteristics and parameter degradation of T-Gate PDSOI PMOSFET...

  • Article
  • Open Access
3 Citations
3,518 Views
8 Pages

Hole Injection Effect and Dynamic Characteristic Analysis of Normally Off p-GaN HEMT with AlGaN Cap Layer on Low-Resistivity SiC Substrate

  • Hsiang-Chun Wang,
  • Chia-Hao Liu,
  • Chong-Rong Huang,
  • Hsien-Chin Chiu,
  • Hsuan-Ling Kao and
  • Xinke Liu

A p-GaN HEMT with an AlGaN cap layer was grown on a low resistance SiC substrate. The AlGaN cap layer had a wide band gap which can effectively suppress hole injection and improve gate reliability. In addition, we selected a 0° angle and low resi...

  • Article
  • Open Access
6 Citations
2,794 Views
12 Pages

In recent years, atomic-doping has been proven to significantly improve the electrochemical performance of biomass-derived carbon materials, which is a promising modification strategy. Among them, there are relatively few reports about O-doping. Here...

  • Article
  • Open Access
2 Citations
3,124 Views
12 Pages

Optimization of Optical Phase Profile in Beam Deflector with Advanced Simulation Method for High Diffraction Efficiency

  • Andrey Manko,
  • Young Kim,
  • Aleksander Morozov,
  • Serguei Palto,
  • Kanghee Won and
  • Hong-Seok Lee

Controlling the phase of light with a high efficiency and precision is essential for applications in imaging, tunable devices, and optical systems. Spatial light modulators (SLMs) based on liquid crystals (LCs) have been regarded as one of the best c...

  • Article
  • Open Access
11 Citations
3,285 Views
14 Pages

A Terahertz Optomechanical Detector Based on Metasurface and Bi-Material Micro-Cantilevers

  • Hailiang Zhu,
  • Kai Wang,
  • Ganyu Liu,
  • Gengchen Wang,
  • Jinchao Mou,
  • Weiwei Zhang and
  • Gao Wei

Terahertz imaging technology has shown great potential in many fields. As the core component of terahertz imaging systems, terahertz detectors have received extensive attention. In this paper, a metasurface-based terahertz optomechanical detector is...

  • Article
  • Open Access
4 Citations
3,235 Views
10 Pages

Gap Effect on Electric Field Enhancement and Photothermal Conversion in Gold Nanostructures

  • Hirotomo Chiba,
  • Kento Kodama,
  • Koki Okada,
  • Yoshiyasu Ichikawa and
  • Masahiro Motosuke

Plasmonic optical tweezers and thermophoresis are promising tools for nanomaterial manipulation. When a gold nanostructure is irradiated with laser light, an electric field around the nanostructure is enhanced because of the localized surface plasmon...

  • Article
  • Open Access
1 Citations
2,958 Views
7 Pages

We investigated the ellipsometer-based characterization method being used to quickly evaluate the depth of the damage layer in ion-implanted 4H-SiC. This method had the advantages of low cost, convenience, and non-destructiveness. Optical absorption...

  • Communication
  • Open Access
4 Citations
2,460 Views
9 Pages

Proteases play a critical role in regulating various physiological processes from protein digestion to wound healing. Monitoring the activity of proteases and screening their inhibitors as potential drug molecules are of great importance for the earl...

  • Article
  • Open Access
4 Citations
3,052 Views
12 Pages

Impact of the Semiconductor Defect Density on Solution-Processed Flexible Schottky Barrier Diodes

  • Julio C. Tinoco,
  • Samuel A. Hernandez,
  • María de la Luz Olvera,
  • Magali Estrada,
  • Rodolfo García and
  • Andrea G. Martinez-Lopez

Schottky barrier diodes, developed by low-cost techniques and low temperature processes (LTP-SBD), have gained attention for different kinds of novel applications, including flexible electronic fabrication. This work analyzes the behavior of the I&nd...

  • Article
  • Open Access
4 Citations
3,596 Views
11 Pages

Stop-Flow Lithography for the Continuous Production of Degradable Hydrogel Achiral Crescent Microswimmers

  • Junfeng Xiong,
  • Xiaoxia Song,
  • Yuhang Cai,
  • Jiahe Liu,
  • Yangyuan Li,
  • Yaqiang Ji,
  • Liang Guo and
  • U Kei Cheang

The small size of robotic microswimmers makes them suitable for performing biomedical tasks in tiny, enclosed spaces. Considering the effects of potentially long-term retention of microswimmers in biological tissues and the environment, the degradabi...

  • Feature Paper
  • Article
  • Open Access
3 Citations
4,488 Views
12 Pages

Wireless Micro Soft Actuator without Payloads Using 3D Helical Coils

  • Seonghyeon Lee,
  • Woojun Jung,
  • Kyungho Ko and
  • Yongha Hwang

To receive a greater power and to demonstrate the soft bellows-shaped actuator’s wireless actuation, micro inductors were built for wireless power transfer and realized in a three-dimensional helical structure, which have previously been built in two...

  • Article
  • Open Access
3 Citations
3,000 Views
16 Pages

High-Efficiency Flicker-Free LED Driver with Soft-Switching Feature

  • Hung-Liang Cheng,
  • Lain-Chyr Hwang,
  • Heidi H. Chang,
  • Qi-You Wang and
  • Chun-An Cheng

A novel interleaved DC-DC buck converter is proposed to drive high-brightness light-emitting diodes (LEDs). The circuit configuration mainly consists of two buck converters, which are connected in parallel and use interleaved operation. Through inter...

  • Article
  • Open Access
8 Citations
2,889 Views
10 Pages

We report the design, fabrication and experimental validation of a THz all-dielectric multi-mode q-plate having a fixed rate of change of the optical axis. The device consists of space-variant birefringent slabs manufactured by 3D printing using melt...

  • Article
  • Open Access
16 Citations
4,407 Views
20 Pages

Single-Pixel Near-Infrared 3D Image Reconstruction in Outdoor Conditions

  • C. Osorio Quero,
  • D. Durini,
  • J. Rangel-Magdaleno,
  • J. Martinez-Carranza and
  • R. Ramos-Garcia

In the last decade, the vision systems have improved their capabilities to capture 3D images in bad weather scenarios. Currently, there exist several techniques for image acquisition in foggy or rainy scenarios that use infrared (IR) sensors. Due to...

  • Article
  • Open Access
14 Citations
3,557 Views
11 Pages

Microgripper Using Soft Microactuators for Manipulation of Living Cells

  • Shunnosuke Kodera,
  • Tomoki Watanabe,
  • Yoshiyuki Yokoyama and
  • Takeshi Hayakawa

We present a microgripper actuated by a soft microactuator for manipulating a single living cell. Soft actuators have attracted attention in recent years because their compliance which can adapt to soft targets. In this study, we propose a microgripp...

  • Article
  • Open Access
10 Citations
6,306 Views
10 Pages

A Wideband High-Efficiency GaN MMIC Power Amplifier for Sub-6-GHz Applications

  • Liulin Hu,
  • Xuejie Liao,
  • Fan Zhang,
  • Haifeng Wu,
  • Shenglin Ma,
  • Qian Lin and
  • Xiaohong Tang

The monolithic microwave integrated circuit (MMIC) power amplifiers serve an essential and critical role in RF transmit/receive (T/R) modules of phased array radar systems, mobile communication systems and satellite systems. Over recent years, there...

  • Article
  • Open Access
12 Citations
4,364 Views
14 Pages

Microfluidics Temperature Compensating and Monitoring Based on Liquid Metal Heat Transfer

  • Jiyu Meng,
  • Chengzhuang Yu,
  • Shanshan Li,
  • Chunyang Wei,
  • Shijie Dai,
  • Hui Li and
  • Junwei Li

Microfluidic devices offer excellent heat transfer, enabling the biochemical reactions to be more efficient. However, the precision of temperature sensing and control of microfluids is limited by the size effect. Here in this work, the relationship b...

  • Article
  • Open Access
8 Citations
3,388 Views
12 Pages

A side ohmic contact mode for the double channel GaN/AlGaN epitaxial layer is proposed in this paper. Rectangle transmission line model (TLM) electrodes are prepared, and the specific contact resistance is tested at the annealing temperatures from 70...

  • Article
  • Open Access
1 Citations
2,188 Views
17 Pages

This study implemented a discharge energy and success-rate monitoring system to replace the traditional oscillograph observation method and conducted a microbial control test for a nanosilver colloid prepared by an Electrical Discharge Machine (EDM)....

  • Article
  • Open Access
2 Citations
3,302 Views
17 Pages

Design of Chopsticks-Shaped Heating Resistors for a Thermal Inkjet: Based on TaN Film

  • Anjiang Lu,
  • Xishun Peng,
  • Qiliang Sun,
  • Jin Cheng,
  • Naitao Xu,
  • Yibo Xie,
  • Jie Ding,
  • Pangyue Li,
  • Ji’an Long and
  • Jiawen Wu

Efficient printing frequency is critical for thermal bubble inkjet printing, while the difficulty lies in the structural design and material selection of the heating resistors. In this paper, a TaN film was used as the main material of the heating re...

  • Review
  • Open Access
5 Citations
2,958 Views
26 Pages

In the past 20 years, the development of an artificial olfactory system has made great progress and improvements. In recent years, as a new type of sensor, nanoelectronic smelling has been widely used in the food and drug industry because of its adva...

  • Article
  • Open Access
5 Citations
3,034 Views
12 Pages

Felodipine Determination by a CdTe Quantum Dot-Based Fluorescent Probe

  • Yuguang Lv,
  • Yuqing Cheng,
  • Kuilin Lv,
  • Guoliang Zhang and
  • Jiang Wu

In this work, a CdTe quantum dot-based fluorescent probe was synthesized to determine felodipine (FEL). The synthesis conditions, structure, and interaction conditions with FEL of CdTe quantum dots were analysed by fluorescence spectrophotometry, Fou...

  • Article
  • Open Access
8 Citations
2,601 Views
13 Pages

In this paper, we have designed, analyzed, and characterized a hybrid-type MEMS device for X-band phase shift measurement. The signal related to a phase shift of the inputs is fractionally in-line coupled by a MEMS beam and delivered to a thermoelect...

  • Article
  • Open Access
11 Citations
3,960 Views
22 Pages

Efficient Water-Assisted Glass Cutting with 355 nm Picosecond Laser Pulses

  • Edgaras Markauskas,
  • Laimis Zubauskas,
  • Bogdan Voisiat and
  • Paulius Gečys

In this study, the cutting of borosilicate glass plates in ambient air and water with a 355 nm wavelength picosecond laser was carried out. Low (2.1–2.75 W) and high (15.5 W) average laser power cutting regimes were studied. Thorough attention...

  • Feature Paper
  • Review
  • Open Access
37 Citations
5,970 Views
22 Pages

Wearable Near-Field Communication Sensors for Healthcare: Materials, Fabrication and Application

  • Xidi Sun,
  • Chengyan Zhao,
  • Hao Li,
  • Huiwen Yu,
  • Jing Zhang,
  • Hao Qiu,
  • Junge Liang,
  • Jing Wu,
  • Mengrui Su and
  • Lijia Pan
  • + 1 author

The wearable device industry is on the rise, with technology applications ranging from wireless communication technologies to the Internet of Things. However, most of the wearable sensors currently on the market are expensive, rigid and bulky, leadin...

  • Article
  • Open Access
31 Citations
7,066 Views
9 Pages

Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates

  • Jingxiang Su,
  • Simon Fichtner,
  • Muhammad Zubair Ghori,
  • Niklas Wolff,
  • Md. Redwanul Islam,
  • Andriy Lotnyk,
  • Dirk Kaden,
  • Florian Niekiel,
  • Lorenz Kienle and
  • Fabian Lofink
  • + 1 author

In this work, we present a method for growing highly c-axis oriented aluminum scandium nitride (AlScN) thin films on (100) silicon (Si), silicon dioxide (SiO2) and epitaxial polysilicon (poly-Si) substrates using a substrate independent approach. The...

  • Article
  • Open Access
15 Citations
4,057 Views
10 Pages

Influence of Surface Tension on Dynamic Characteristics of Single Bubble in Free-Field Exposed to Ultrasound

  • Hao Wu,
  • Tianshu Zhang,
  • Xiaochen Lai,
  • Haixia Yu,
  • Dachao Li,
  • Hao Zheng,
  • Hui Chen,
  • Claus-Dieter Ohl and
  • Yuanyuan Li

The motion of bubbles in an ultrasonic field is a fundamental physical mechanism in most applications of acoustic cavitation. In these applications, surface-active solutes, which could lower the surface tension of the liquid, are always utilized to i...

  • Article
  • Open Access
53 Citations
3,911 Views
15 Pages

The tremendous acoustic impedance difference between the piezoelectric composite and air prevents the ultrasonic transition, resulting in low amplitude for the received signal for the composite defect detection using an air-coupled transducer. The ma...

  • Review
  • Open Access
55 Citations
6,758 Views
25 Pages

From Soft to Hard Biomimetic Materials: Tuning Micro/Nano-Architecture of Scaffolds for Tissue Regeneration

  • Felicia Carotenuto,
  • Sara Politi,
  • Arsalan Ul Haq,
  • Fabio De Matteis,
  • Emanuela Tamburri,
  • Maria Letizia Terranova,
  • Laura Teodori,
  • Alessandra Pasquo and
  • Paolo Di Nardo

Failure of tissues and organs resulting from degenerative diseases or trauma has caused huge economic and health concerns around the world. Tissue engineering represents the only possibility to revert this scenario owing to its potential to regenerat...

  • Article
  • Open Access
12 Citations
3,492 Views
13 Pages

High Quality-Factor and Spectrum-Clean AlN Lamb-Wave Resonators with Optimized Lateral Reflection Boundary Conditions and Transducer Design

  • Haiyan Sun,
  • Shitao Lv,
  • Aoyu Zhang,
  • Chenguang Song,
  • Xinyi Sun,
  • Fazeng Tan,
  • Liuhong Liang,
  • Yinfang Zhu and
  • Jicong Zhao

This paper presents a high quality-factor (Q) and spectrum-clean AlN Lamb-wave resonator (LWR). The width of its lateral reflection boundary was optimized to weaken the transverse modes’ coupling and wave guiding, and then to improve the LWR&rs...

  • Article
  • Open Access
49 Citations
7,356 Views
14 Pages

Influence of Polyvinylpyrrolidone Concentration on Properties and Anti-Bacterial Activity of Green Synthesized Silver Nanoparticles

  • Raghad Zein,
  • Ibrahim Alghoraibi,
  • Chadi Soukkarieh,
  • Mohammad Taher Ismail and
  • Abdalrahim Alahmad

Environmentally green synthesis of stable polyvinyl pyrrolidone (PVP)-capped silver nanoparticles (PVP-AgNPs) was successfully carried out. The present study focused on investigating the influence of adding PVP during the synthesis process on the siz...

  • Article
  • Open Access
1 Citations
2,491 Views
16 Pages

High-speed mechanical drilling based on the micro-bit is the mainstream process technology for machining micro-holes in the printed circuit board (PCB). However, the above process to obtain PCB micro-holes is prone to defects, such as hole burrs and...

  • Review
  • Open Access
33 Citations
5,936 Views
23 Pages

Design Aspects of Additive Manufacturing at Microscale: A Review

  • Nikolaos Rogkas,
  • Christos Vakouftsis,
  • Vasilios Spitas,
  • Nikos D. Lagaros and
  • Stelios K. Georgantzinos

Additive manufacturing (AM) technology has been researched and developed for almost three decades. Microscale AM is one of the fastest-growing fields of research within the AM area. Considerable progress has been made in the development and commercia...

  • Feature Paper
  • Article
  • Open Access
2 Citations
2,897 Views
8 Pages

Generating the desired solute concentration signal in micro-environments is vital to many applications ranging from micromixing to analyzing cellular response to a dynamic microenvironment. We propose a new modular design to generate targeted tempora...

  • Article
  • Open Access
11 Citations
3,197 Views
17 Pages

One major concern regarding multi-material additive manufacturing (MMAM) is the strength at the interface between materials. Based on the observation of how nature puts materials together, this paper hypothesizes that overlapping and interlacing mate...

  • Article
  • Open Access
2 Citations
2,794 Views
8 Pages

Low Cost Three-Dimensional Programmed Mini-Pump Used in PCR

  • Chengxiong Lin,
  • Yaocheng Wang,
  • Zhengyu Huang,
  • Yu Guo and
  • Wenming Wu

Programmed mini-pumps play a significant role in various fields, such as chemistry, biology, and medicine, to transport a measured volume of liquid, especially in the current detection of COVID-19 with PCR. In view of the cost of the current automati...

  • Article
  • Open Access
11 Citations
2,586 Views
16 Pages

Hydrogen peroxide (H2O2) can be considered as a sterilant or a green propellant. For a common use in industrial application, spray is an effective method to form fine H2O2 droplets. In this paper, electrostatic atomization based on the configuration...

  • Article
  • Open Access
14 Citations
2,540 Views
12 Pages

Vascular interventional surgery is a typical method for diagnosing and treating cardio-cerebrovascular diseases. However, a surgeon is exposed to significant X-radiation exposure when the operation is conducted for a long period of time. A vascular i...

  • Article
  • Open Access
2 Citations
2,547 Views
17 Pages

Beating of a Spherical Liquid Crystal Elastomer Balloon under Periodic Illumination

  • Wenyan Cheng,
  • Quanbao Cheng,
  • Changshen Du,
  • Yuntong Dai and
  • Kai Li

Periodic excitation is a relatively simple and common active control mode. Owing to the advantages of direct access to environmental energy and controllability under periodic illumination, it enjoys broad prospects for application in soft robotics an...

  • Feature Paper
  • Article
  • Open Access
1 Citations
3,103 Views
19 Pages

Based on the modern microelectromechanical systems technology, we present a revolutionary miniaturized artificial cochlear sensory epithelium for future implantation tests on guinea pigs. The device was curved to fit the spiral structure of the cochl...

  • Article
  • Open Access
2 Citations
2,524 Views
20 Pages

An analysis of the R134a (tetrafluoroetane) coolant’s non-stationary behavior in rectangular microchannels was conducted with the help of a newly proposed miniature refrigerating machine of our own design and construction. The experimental devi...

  • Article
  • Open Access
5 Citations
3,006 Views
19 Pages

The high-purity G5 graphite material is widely used for glass moulding and provides high hardness and brittleness because it is sintered to fine particles unlike other graphite materials. Hence, tool cutting of a G5 workpiece is performed by local fr...

  • Article
  • Open Access
3 Citations
3,367 Views
9 Pages

Manufacturing of Porous Glass by Femtosecond Laser Welding

  • Hua Tan,
  • Jiahui Pan,
  • Xiaojia Zheng,
  • Xiaoquan Fu,
  • Yuxun Zhang,
  • Yanxing Liu and
  • Qiheng Huang

Based on femtosecond laser glass welding, four different porous structures of welding spots were formed by the manufacturing processes of spatiotemporal beam shaping and alternating high repetition rate transformation. Compared with an ordinary Gauss...

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Micromachines - ISSN 2072-666X