Article Versions Notes

Sun Q, Tang J, Shen L, Lan J, Shen Z, Xiao J, Chen X, Zhang J, Wu Y, Xu J, et al. Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process. Micromachines. 2022; 13(6):899. https://doi.org/10.3390/mi13060899

Sun, Quanquan, Jiaxuan Tang, Lifeng Shen, Jie Lan, Zhenfeng Shen, Junfeng Xiao, Xiao Chen, Jianguo Zhang, Yu Wu, Jianfeng Xu, and et al. 2022. "Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process" Micromachines 13, no. 6: 899. https://doi.org/10.3390/mi13060899

Sun, Q., Tang, J., Shen, L., Lan, J., Shen, Z., Xiao, J., Chen, X., Zhang, J., Wu, Y., Xu, J., & Wang, X. (2022). Fabrication of High Precision Silicon Spherical Microlens Arrays by Hot Embossing Process. Micromachines, 13(6), 899. https://doi.org/10.3390/mi13060899