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Journal: Micromachines, 2023
Volume: 14
Number: 956
Article:
A Wafer Pre-Alignment Algorithm Based on Weighted Fourier Series Fitting of Circles and Least Squares Fitting of Circles
Authors:
by
Jingsong Chen, Zhou Lan, Cheng Xue, Jun Lan, Zhenghao Liu and Yong Yang
Link:
https://www.mdpi.com/2072-666X/14/5/956
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