MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects
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Ahmad, M.; Bahri, M.; Sawan, M. MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects. Micromachines 2024, 15, 1233. https://doi.org/10.3390/mi15101233
Ahmad M, Bahri M, Sawan M. MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects. Micromachines. 2024; 15(10):1233. https://doi.org/10.3390/mi15101233
Chicago/Turabian StyleAhmad, Mansoor, Mohamed Bahri, and Mohamad Sawan. 2024. "MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects" Micromachines 15, no. 10: 1233. https://doi.org/10.3390/mi15101233