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Journal: MicromachinesVolume: 15Number: 1256
Article: Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Miniaturization
- Authors:
- Panliang Tang1,2,
- Hongzhi Pan2 and
- Temesgen Bailie Workie1
- et al.
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