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Journal: Micromachines, 2024
Volume: 15
Number: 1295
Article:
Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications
Authors:
by
Abdurrashid Hassan Shuaibu, Almur A. S. Rabih, Yves Blaquière and Frederic Nabki
Link:
https://www.mdpi.com/2072-666X/15/11/1295
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