Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications
Abstract
:1. Introduction
2. Design and Simulation
2.1. Design Configuration
2.2. Simulation
3. Fabrication and Characterization
4. Measurements and Results
4.1. Displacement Measurement
4.2. Contact Resistance Measurement
4.3. Switching Time
4.4. Breakdown Voltage Test
5. Discussion
5.1. Sidewall Topography Characterization
5.2. Manual Activation of the MEMS Switches with a Probe Needle
5.3. Comparison with State-of-the-Art MEMS Switches
6. Conclusions and Perspective
Author Contributions
Funding
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Geometry Parameter | Symbol | Value |
---|---|---|
Length of the chevron actuator | 500 μm | |
Length of the shuttle | 110 μm | |
Width of the chevron actuator | 6 μm | |
Width of the chevron actuator | 21 μm | |
Width of the Padoxide | 11 μm | |
Width of Padmetal | 5 μm | |
Angle of chevron beams | β | 1.4° |
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Shuaibu, A.H.; Rabih, A.A.S.; Blaquière, Y.; Nabki, F. Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications. Micromachines 2024, 15, 1295. https://doi.org/10.3390/mi15111295
Shuaibu AH, Rabih AAS, Blaquière Y, Nabki F. Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications. Micromachines. 2024; 15(11):1295. https://doi.org/10.3390/mi15111295
Chicago/Turabian StyleShuaibu, Abdurrashid Hassan, Almur A. S. Rabih, Yves Blaquière, and Frederic Nabki. 2024. "Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications" Micromachines 15, no. 11: 1295. https://doi.org/10.3390/mi15111295