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Journal: Micromachines, 2024
Volume: 15
Number: 576
Article:
Effect of Deposition Pressure and Temperature on Tungsten Thin-Film Heater for Phase-Change Switch Applications
Authors:
by
Sheng Qu, Jihua Zhang, Libin Gao, Hongwei Chen and Yao Ding
Link:
https://www.mdpi.com/2072-666X/15/5/576
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