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Micromachines, Volume 15, Issue 5

2024 May - 110 articles

Cover Story: Researchers used a horizontal hot wall CVD reactor to grow a homoepitaxial layer on a 150 mm, 4° off-axis 4H-SiC wafer, using H2 as the carrier gas, TCS as the Si source and C3H8 or C2H4 as the carbon source, respectively. The Cl element from TCS was introduced to change the formation of intermediate products and optimize the epitaxial quality. They compared the effect of C3H8 and C2H4 as a carbon source. The C2H4 sample showed a slower growth rate and lower doping but better uniformity and surface roughness, which indicates that C2H4 is more suitable for conventional growth processes in commercial wafer production than C3H8. The study highlights that buffer layer conditions, particularly varying C/Si ratios, critically influence epitaxial quality, which is essential for in-sequence device manufacturing. View this paper
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Articles (110)

  • Feature Paper
  • Review
  • Open Access
15 Citations
8,385 Views
28 Pages

Magnetic Microrobots for In Vivo Cargo Delivery: A Review

  • Jialin Lin,
  • Qingzheng Cong and
  • Dandan Zhang

Magnetic microrobots, with their small size and agile maneuverability, are well-suited for navigating the intricate and confined spaces within the human body. In vivo cargo delivery within the context of microrobotics involves the use of microrobots...

  • Article
  • Open Access
2 Citations
2,555 Views
11 Pages

A Portable, Integrated, Sample-In Result-Out Nucleic Acid Diagnostic Device for Rapid and Sensitive Chikungunya Virus Detection

  • Changping Xu,
  • Yalin Chen,
  • Guiying Zhu,
  • Huan Wu,
  • Qi Jiang,
  • Rui Zhang,
  • Beibei Yu,
  • Lei Fang and
  • Zhiwei Wu

Chikungunya virus, a mosquito-borne virus that causes epidemics, is often misdiagnosed due to symptom similarities with other arboviruses. Here, a portable and integrated nucleic acid-based diagnostic device, which combines reverse transcription-loop...

  • Article
  • Open Access
2 Citations
4,243 Views
11 Pages

High-Dynamic-Range Integrated NV Magnetometers

  • Tianning Wang,
  • Zhenhua Liu,
  • Yankang Liu,
  • Bo Wang,
  • Yuanyuan Shen and
  • Li Qin

High-dynamic-range integrated magnetometers demonstrate extensive potential applications in fields involving complex and changing magnetic fields. Among them, Diamond Nitrogen Vacancy Color Core Magnetometer has outstanding performance in wide-range...

  • Article
  • Open Access
1 Citations
2,362 Views
12 Pages

This paper proposes an improved method to calculate the mutual capacitance between interdigital transducer (IDT) electrodes to enhance the accuracy of the traditional coupling-of-modes (COM) model, which is commonly used to simulate surface acoustic...

  • Article
  • Open Access
1 Citations
1,298 Views
13 Pages

The laminar flow meter (LFM) boasts several advantages such as no moving parts, a wide range ratio, high measurement accuracy, quick dynamic response, etc., and is a promising technology for micro gas flow measurement. In order to explore the influen...

  • Article
  • Open Access
6 Citations
3,034 Views
18 Pages

Hypertension is a common cause of cardiovascular diseases, closely associated with the high mortality and disability rates of cardiovascular diseases such as stroke and coronary heart disease. Therefore, developing a comfortable and sustainable devic...

  • Article
  • Open Access
3 Citations
1,738 Views
16 Pages

During circuit conduction immunity simulation assessments, the existing black-box modeling methods for chips generally involve the use of time-domain-based modeling methods or ICIM-CI binary decision models, which can provide approximate immunity ass...

  • Article
  • Open Access
3 Citations
2,902 Views
17 Pages

In this paper, a 3 dB 90-degree hybrid coupler with size reduction and harmonics rejection was designed. In the proposed coupler structure, four simple low-pass filters (LPFs) were applied. An artificial neural network (ANN) was used to determine the...

  • Article
  • Open Access
2 Citations
1,936 Views
11 Pages

Passive Wireless Partial Discharge Sensors with Multiple Resonances

  • Zhenheng Xu,
  • Bing Tian,
  • Shiqi Guo,
  • Qingan Huang,
  • Lifeng Wang and
  • Lei Dong

Partial discharge (PD) is the dominant insulating defect in Gas-Insulated Switchgear (GIS). The existing detection methods are mainly divided into built-in wire-connected disk antennas with destructive drilling and external ultra-high frequency anten...

  • Article
  • Open Access
7 Citations
1,879 Views
13 Pages

Many micro-scraps are generated when a micro-triangular pyramid array (MTPA) is machined by the fly-cutting method. Micro-scraps are generally not removed quickly enough; therefore, these residual micro-scraps participate in the cutting process again...

  • Article
  • Open Access
7 Citations
2,020 Views
16 Pages

Research on the Influence of the Material Removal Profile of a Spherical Polishing Tool on the Mid-Spatial Frequency Errors of Optical Surfaces

  • Zhaohao He,
  • Kuo Hai,
  • Kailong Li,
  • Jiahao Yu,
  • Lingwei Wu,
  • Lin Zhang,
  • Xing Su,
  • Lisheng Cai,
  • Wen Huang and
  • Wei Hang

Elastic spherical polishing tools effectively conform to the polishing surface and exhibit high efficiency in the removal of materials, so they are extensively used in the sub-aperture polishing stages of optical components. However, their processing...

  • Article
  • Open Access
3 Citations
2,248 Views
14 Pages

Surface plasmon resonance (SPR) has been extensively employed in biological sensing, environmental detection, as well as chemical industry. Nevertheless, the performance possessed by conventional surface plasmon resonance (SPR) biosensors can be furt...

  • Article
  • Open Access
2 Citations
2,383 Views
14 Pages

Synthesis of Submicron CaCO3 Particles in 3D-Printed Microfluidic Chips Supporting Advection and Diffusion Mixing

  • Ivan Reznik,
  • Ekaterina Kolesova,
  • Anna Pestereva,
  • Konstantin Baranov,
  • Yury Osin,
  • Kirill Bogdanov,
  • Jacobus Swart,
  • Stanislav Moshkalev and
  • Anna Orlova

Microfluidic technology provides a solution to the challenge of continuous CaCO3 particle synthesis. In this study, we utilized a 3D-printed microfluidic chip to synthesize CaCO3 micro- and nanoparticles in vaterite form. Our primary focus was on inv...

  • Article
  • Open Access
17 Citations
2,604 Views
14 Pages

Development of Wearable Textile MIMO Antenna for Sub-6 GHz Band New Radio 5G Applications

  • Pendli Pradeep,
  • Mohammed Mahaboob Basha,
  • Srinivasulu Gundala and
  • Javed Syed

In this paper, an irregular octagonal two-port MIMO patch antenna is designed specifically for New Radio (NR) 5G applications in the mid-band sub-6 GHz. The proposed antenna comprises an irregularly shaped patch antenna equipped with a regular 50-ohm...

  • Article
  • Open Access
2 Citations
3,396 Views
13 Pages

In this paper, we report a low-cost printing process of carbon nanotube (CNT)-based, all-organic microelectrode arrays (MEAs) suitable for in vitro neural stimulation and recording. Conventional MEAs have been mainly composed of expensive metals and...

  • Article
  • Open Access
5 Citations
1,650 Views
16 Pages

Broadening Bandwidth in a Semi-Active Vibration Absorption System Utilizing Stacked Polyvinyl Chloride Gel Actuators

  • Zhuoyuan Li,
  • Chen Liu,
  • Meiping Sheng,
  • Minqing Wang,
  • Hualing Chen,
  • Bo Li and
  • Peng Xia

Plasticized polyvinyl chloride (PVC) gel is a new soft and smart material, whose potential in electroactive variable stiffness can be used for vibration control in soft robotic systems. In this paper, a new semi-active vibration absorber is developed...

  • Article
  • Open Access
10 Citations
5,168 Views
12 Pages

Modeling and Reliability Analysis of MEMS Gyroscope Rotor Parameters under Vibrational Stress

  • Lei Wang,
  • Yuehong Pan,
  • Kai Li,
  • Lilong He,
  • Qingyi Wang and
  • Weidong Wang

Vibrational environments can cause drift or changes in Micro-Electro-Mechanical System (MEMS) gyroscope rotor parameters, potentially impacting their performance. To improve the effective use of MEMS gyroscopes, this study introduced a method for eva...

  • Article
  • Open Access
2 Citations
2,934 Views
13 Pages

This paper pioneers a novel approach in electromagnetic (EM) system analysis by synergistically combining Bayesian Neural Networks (BNNs) informed by Latin Hypercube Sampling (LHS) with advanced thermal–mechanical surrogate modeling within COMS...

  • Article
  • Open Access
1,628 Views
10 Pages

Evaluation of Phototoxicity of Short-Wavelength Laser Light Utilizing PCNA Accumulation

  • Tetsuya Matsuyama,
  • Noboru Osaka,
  • Mikiya Yamaguchi,
  • Naohiro Kanamaru,
  • Kenji Wada,
  • Ai Kawakita,
  • Kaori Murata,
  • Kenji Sugimoto and
  • Koichi Okamoto

In recent years, diseases such as age-related macular degeneration and retinal pigment degeneration caused by excessive exposure to short-wavelength visible light have become significant concerns. With the aim of quantitatively evaluating the toxicit...

  • Article
  • Open Access
6 Citations
4,421 Views
11 Pages

The widespread vibration is one of the most promising energy sources for IoT and small sensors, and broad-frequency vibration energy harvesting is important. Triboelectric nanogenerators (TENGs) can convert vibration energy into electrical energy thr...

  • Communication
  • Open Access
3 Citations
2,445 Views
7 Pages

A High-Energy, Wide-Spectrum, Spatiotemporal Mode-Locked Fiber Laser

  • Boyuan Ge,
  • Yajun Lou,
  • Silin Guo,
  • Yue Cai and
  • Xinhai Zhang

In this article, we demonstrate a high-energy, wide-spectrum, spatiotemporal mode-locked (STML) fiber laser. Unlike traditional single-mode fiber lasers, STML fiber lasers theoretically enable mode-locking with various combinations of transverse mode...

  • Article
  • Open Access
6 Citations
1,924 Views
15 Pages

In this paper, the single-event burnout (SEB) and reinforcement structure of 1200 V SiC MOSFET (SG-SBD-MOSFET) with split gate and Schottky barrier diode (SBD) embedded were studied. The device structure was established using Sentaurus TCAD, and the...

  • Article
  • Open Access
1 Citations
2,488 Views
18 Pages

Design and Analysis of 5-DOF Compact Electromagnetic Levitation Actuator for Lens Control of Laser Cutting Machine

  • Chuan Zhao,
  • Qinwei Zhang,
  • Wenzhe Pei,
  • Junjie Jin,
  • Feng Sun,
  • Hongkui Zhang,
  • Ran Zhou,
  • Dongning Liu,
  • Fangchao Xu and
  • Lijian Yang
  • + 1 author

In laser beam processing, the angle or offset between the auxiliary gas and the laser beam axis have been proved to be two new process optimization parameters for improving cutting speed and quality. However, a traditional electromechanical actuator...

  • Review
  • Open Access
22 Citations
14,018 Views
26 Pages

A Review of Femtosecond Laser Processing of Silicon Carbide

  • Quanjing Wang,
  • Ru Zhang,
  • Qingkui Chen and
  • Ran Duan

Silicon carbide (SiC) is a promising semiconductor material as well as a challenging material to machine, owing to its unique characteristics including high hardness, superior thermal conductivity, and chemical inertness. The ultrafast nature of femt...

  • Review
  • Open Access
7 Citations
2,479 Views
17 Pages

LDH-Based Voltammetric Sensors

  • Domenica Tonelli,
  • Matteo Tonelli,
  • Stefano Gianvittorio and
  • Andreas Lesch

Layered double hydroxides (LDHs), also named hydrotalcite-like compounds, are anionic clays with a lamellar structure which have been extensively used in the last two decades as electrode modifiers for the design of electrochemical sensors. These mat...

  • Article
  • Open Access
5 Citations
2,028 Views
18 Pages

In this article, an ultra-wideband (UWB) antenna featuring two reconfigurable quasi-perfect stop bands at WLAN (5.25–5.75 GHz) and lower 5G (3.4–3.8 GHz) utilizing electromagnetic bandgaps (EBGs) and positive-intrinsic-negative (P-I-N) di...

  • Article
  • Open Access
2 Citations
1,679 Views
12 Pages

Improving measurement accuracy is the core issue with surface acoustic wave (SAW) micro-force sensors. An electrode transducer can stimulate not only the SAW but also the bulk acoustic wave (BAW). A portion of the BAW can be picked up by the receivin...

  • Article
  • Open Access
7 Citations
2,884 Views
17 Pages

Solid oxide fuel cells (SOFCs) are a green energy technology that offers a cleaner and more efficient alternative to fossil fuels. The efficiency and utility of SOFCs can be enhanced by fabricating miniaturized component structures within the fuel ce...

  • Article
  • Open Access
3,365 Views
19 Pages

A top-down design methodology and implementation of a time domain sensor is presented in this paper. The acceleration resolution of the time domain sensor is equal to the time-measurement accuracy divided by the sensor sensitivity. Combined with the...

  • Article
  • Open Access
11 Citations
2,736 Views
15 Pages

Hydrazine is considered a powerful reducing agent and catalyst, showing diverse applications in agricultural industries, toxic degradation research, and wastewater management. Additionally, hydrazine can trigger some specific reactions when combined...

  • Article
  • Open Access
3,684 Views
9 Pages

Resonance Modes of Water Drops Pinned to a Vibrating Rectangular Post

  • Paolo Sartori,
  • Davide Ferraro,
  • Matteo Pierno and
  • Giampaolo Mistura

We studied the effects of vertical vibrations on a water drop that was pinned to the sharp edges of a rectangular post. By varying the frequency and amplitude of the vertical displacement, distinct resonance peaks were observed using a simple optical...

  • Feature Paper
  • Article
  • Open Access
8 Citations
4,650 Views
13 Pages

Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes

  • Pierre Balage,
  • Manon Lafargue,
  • Théo Guilberteau,
  • Guillaume Bonamis,
  • Clemens Hönninger,
  • John Lopez and
  • Inka Manek-Hönninger

In this contribution, we present novel results on top-down drilling in silicon, the most important semiconductor material, focusing specifically on the influence of the laser parameters. We compare the holes obtained with repetitive single pulses, as...

  • Article
  • Open Access
6 Citations
2,484 Views
17 Pages

The LSPR biosensor chip is a groundbreaking tool popular in laboratory settings for identifying disease markers. However, its use in clinical environments is not as widespread. One notable gap is the lack of a universal signal processing tool for LSP...

  • Review
  • Open Access
26 Citations
6,717 Views
18 Pages

Recent Advances in Microfluidic-Based Extracellular Vesicle Analysis

  • Jiming Chen,
  • Meiyu Zheng,
  • Qiaoling Xiao,
  • Hui Wang,
  • Caixing Chi,
  • Tahui Lin,
  • Yulin Wang,
  • Xue Yi and
  • Lin Zhu

Extracellular vesicles (EVs) serve as vital messengers, facilitating communication between cells, and exhibit tremendous potential in the diagnosis and treatment of diseases. However, conventional EV isolation methods are labor-intensive, and they ha...

  • Review
  • Open Access
6 Citations
5,259 Views
17 Pages

Micro-scale positioning techniques have become essential in numerous engineering systems. In the field of fluid mechanics, particle tracking velocimetry (PTV) stands out as a key method for tracking individual particles and reconstructing flow fields...

  • Feature Paper
  • Article
  • Open Access
3 Citations
2,485 Views
13 Pages

A Soft Robot Tactile Finger Using Oxidation-Reduction Graphene–Polyurethane Conductive Sponge

  • Hangze Li,
  • Chaolin Ma,
  • Jinmiao Chen,
  • Haojie Wang,
  • Xiao Chen,
  • Zhijing Li and
  • Youzhi Zhang

Currently, intelligent robotics is supplanting traditional industrial applications. It extends to business, service and care industries, and other fields. Stable robot grasping is a necessary prerequisite for all kinds of complex application scenario...

  • Article
  • Open Access
9 Citations
4,492 Views
15 Pages

Experimental Investigation on Ultra-Thin Vapor Chamber with Composite Wick for Electronics Thermal Management

  • Shiwei Zhang,
  • Haoyi Huang,
  • Jingjing Bai,
  • Caiman Yan,
  • Huarong Qiu,
  • Yong Tang and
  • Fangqiong Luo

Ultra-thin vapor chambers (UTVCs) are widely used to cool high-power electronics due to their excellent thermal conductivity. In this study, a UTVC of 82 mm × 58 mm × 0.39 mm with composite wick was prepared. The composite wick is compose...

  • Review
  • Open Access
6 Citations
2,664 Views
32 Pages

Progress in Research on White Organic Light-Emitting Diodes Based on Ultrathin Emitting Layers

  • Wencheng Zhao,
  • Xiaolin Hu,
  • Fankang Kong,
  • Jihua Tang,
  • Duxv Yan,
  • Jintao Wang,
  • Yuru Liu,
  • Yuanping Sun,
  • Ren Sheng and
  • Ping Chen

White organic light-emitting diodes (WOLEDs) hold vast prospects in the fields of next-generation displays and solid-state lighting. Ultrathin emitting layers (UEMLs) have become a research hotspot because of their unique advantage. On the basis of s...

  • Feature Paper
  • Review
  • Open Access
16 Citations
3,737 Views
25 Pages

Underground Ink: Printed Electronics Enabling Electrochemical Sensing in Soil

  • Kuan-Yu Chen,
  • Jeneel Kachhadiya,
  • Sharar Muhtasim,
  • Shuohao Cai,
  • Jingyi Huang and
  • Joseph Andrews

Improving agricultural production relies on the decisions and actions of farmers and land managers, highlighting the importance of efficient soil monitoring techniques for better resource management and reduced environmental impacts. Despite consider...

  • Communication
  • Open Access
6 Citations
3,455 Views
15 Pages

Ultrasonic wireless power transfer technology (UWPT) represents a key technology employed for energizing implantable medical devices (IMDs). In recent years, aluminum nitride (AlN) has gained significant attention due to its biocompatibility and comp...

  • Article
  • Open Access
6 Citations
3,538 Views
26 Pages

Efficient and stable heat dissipation structure is crucial for improving the convective heat transfer performance of thermal protection systems (TPSs) for hypersonic aircraft. However, the heat dissipation wall of the current TPS is limited by a sing...

  • Feature Paper
  • Article
  • Open Access
6 Citations
2,737 Views
17 Pages

From Formulation to Application: Effects of Plasticizer on the Printability of Fluoro Elastomer Compounds and Additive Manufacturing of Specialized Seals

  • Mookkan Periyasamy,
  • AA Mubasshir,
  • Stiven Kodra,
  • Sangeetham Chandramouli,
  • Ronald Campbell,
  • David O. Kazmer and
  • Joey L. Mead

This work investigated material extrusion additive manufacturing (MatEx AM) of specialized fluoroelastomer (FKM) compounds for applications in rubber seals and gaskets. The influence of a commercially available perfluoropolyether (PFPE) plasticizer o...

  • Feature Paper
  • Communication
  • Open Access
2,005 Views
11 Pages

Influence of Surface Treatments on Urea Detection Using Si Electrolyte-Gated Transistors with Different Gate Electrodes

  • Wonyeong Choi,
  • Seonghwan Shin,
  • Jeonghyeon Do,
  • Jongmin Son,
  • Kihyun Kim and
  • Jeong-Soo Lee

We investigated the impact of surface treatments on Si-based electrolyte-gated transistors (EGTs) for detecting urea. Three types of EGTs were fabricated with distinct gate electrodes (Ag, Au, Pt) using a top-down method. These EGTs exhibited excepti...

  • Article
  • Open Access
2 Citations
2,451 Views
16 Pages

ANN-Based LiDAR Positioning System for B5G

  • Egidio Raimundo Neto,
  • Matheus Ferreira Silva,
  • Tomás P. V. Andrade and
  • Arismar Cerqueira Sodré Junior

This work reports the development of an efficient and precise indoor positioning system utilizing two-dimensional (2D) light detection and ranging (LiDAR) technology, aiming to address the challenging sensing and positioning requirements of the beyon...

  • Article
  • Open Access
8 Citations
3,838 Views
12 Pages

Capillary Force-Driven Quantitative Plasma Separation Method for Application of Whole Blood Detection Microfluidic Chip

  • Xiaohua Fang,
  • Cuimin Sun,
  • Peng Dai,
  • Zhaokun Xian,
  • Wenyun Su,
  • Chaowen Zheng,
  • Dong Xing,
  • Xiaotian Xu and
  • Hui You

Separating plasma or serum from blood is essential for precise testing. However, extracting precise plasma quantities outside the laboratory poses challenges. A recent study has introduced a capillary force-driven membrane filtration technique to acc...

  • Article
  • Open Access
2,140 Views
23 Pages

This study aims to provide condensation heat transfer coefficients of R600a (isobutane) refrigerant under mass fluxes between 50 and 98 kg/m2·s at saturation temperatures of 35 °C, 40 °C and 45 °C. Additionally, experiments are con...

  • Article
  • Open Access
9 Citations
4,775 Views
11 Pages

A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry–Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties...

  • Article
  • Open Access
1 Citations
4,698 Views
15 Pages

30 April 2024

This article proposes a novel design for an in-memory computing SRAM, the DAM SRAM CORE, which integrates storage and computational functionality within a unified 11T SRAM cell and enables the performance of large-scale parallel Multiply–Accumu...

  • Article
  • Open Access
9 Citations
2,474 Views
19 Pages

30 April 2024

The dimensional accuracy and microstructure affect the service performance of parts fabricated by wire arc additive manufacturing (WAAM). Regulating the geometry and microstructure of such parts presents a challenge. The coupling method of an artific...

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Micromachines - ISSN 2072-666X