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Journal: Micromachines, 2025
Volume: 16
Number: 214
214
Article: A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated
Authors: by Kaixuan He, Rui Feng, Yu Zheng, Lijian Guo, Qichao Liao, Dongfang Song, Yuan Xiang and Xinxin Li
Link: https://www.mdpi.com/2072-666X/16/2/214

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