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Journal: Micromachines, 2025
Volume: 16
Number: 503

Article: Fabrication of Anti-Reflective Composite Structures on Inverted Pyramids Using Inductively Coupled Plasma Etching
Authors: by Zhiwei Fan, Liang Xu, Biyun Zhou and Tao Chen
Link: https://www.mdpi.com/2072-666X/16/5/503

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