This is an early access version, the complete PDF, HTML, and XML versions will be available soon.
Open AccessArticle
Simulation Study of Crystalline Al2O3 Thin Films Prepared at Low Temperatures: Effect of Deposition Temperature and Biasing Voltage
by
Wei Jiang
Wei Jiang 1,*
,
Jianhang Ju
Jianhang Ju 1,
Yuanliang Sun
Yuanliang Sun 1,
Ling Weng
Ling Weng 1,
Zhiyuan Wang
Zhiyuan Wang 1,
Xiaofeng Wang
Xiaofeng Wang 2,
Jinna Liu
Jinna Liu 3 and
Enhao Wang
Enhao Wang 1
1
School of Materials Science and Chemical Engineering, Harbin University of Science and Technology, Harbin 150080, China
2
State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150006, China
3
Key Laboratory of Superlight Material and Surface Technology of Ministry of Education, College of Material Science and Chemical Engineering, Harbin Engineering University, Harbin 150001, China
*
Author to whom correspondence should be addressed.
Metals 2024, 14(8), 875; https://doi.org/10.3390/met14080875 (registering DOI)
Submission received: 28 June 2024
/
Revised: 27 July 2024
/
Accepted: 27 July 2024
/
Published: 29 July 2024
Abstract
In this paper, classical molecular dynamics simulations were used to explore the impact of deposition temperature and bias voltage on the growth of Al2O3 thin films through magnetron sputtering. Ion energy distributions were derived from plasma mass spectrometer measurements. The fluxes of deposited particles (Ar+, Al+, and O−) were categorized into low, medium, and high energies, and the results show that the films are dominated by amorphous Al2O3 at low incident energies without applying bias. As the deposition temperature increased, the crystallinity of the films also increased, with the crystals predominantly consisting of γ-Al2O3. The crystal content of the deposited films increased when biased with −20 V compared to when no bias was applied. Crystalline films were successfully obtained at a deposition temperature of 773 K with a −20 V bias. When biased with −40 V, crystals could be obtained at a lower deposition temperature of 573 K. Increasing the bias enables the particles to have higher energy to overcome the nucleation barrier of the crystallization process, leading to a greater degree of film crystallization. At this stage, the average bond length between Al-O is measured to be approximately 1.89 Å to 1.91 Å, closely resembling that of the crystal.
Share and Cite
MDPI and ACS Style
Jiang, W.; Ju, J.; Sun, Y.; Weng, L.; Wang, Z.; Wang, X.; Liu, J.; Wang, E.
Simulation Study of Crystalline Al2O3 Thin Films Prepared at Low Temperatures: Effect of Deposition Temperature and Biasing Voltage. Metals 2024, 14, 875.
https://doi.org/10.3390/met14080875
AMA Style
Jiang W, Ju J, Sun Y, Weng L, Wang Z, Wang X, Liu J, Wang E.
Simulation Study of Crystalline Al2O3 Thin Films Prepared at Low Temperatures: Effect of Deposition Temperature and Biasing Voltage. Metals. 2024; 14(8):875.
https://doi.org/10.3390/met14080875
Chicago/Turabian Style
Jiang, Wei, Jianhang Ju, Yuanliang Sun, Ling Weng, Zhiyuan Wang, Xiaofeng Wang, Jinna Liu, and Enhao Wang.
2024. "Simulation Study of Crystalline Al2O3 Thin Films Prepared at Low Temperatures: Effect of Deposition Temperature and Biasing Voltage" Metals 14, no. 8: 875.
https://doi.org/10.3390/met14080875
Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details
here.
Article Metrics
Article Access Statistics
For more information on the journal statistics, click
here.
Multiple requests from the same IP address are counted as one view.