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Journal: Appl. Sci., 2020
Volume: 10
Number: 3250

Article: Precise Measurement of the Surface Shape of Silicon Wafer by Using a New Phase-Shifting Algorithm and Wavelength-Tuning Interferometer
Authors: by Fuqing Miao, Seokyoung Ahn and Yangjin Kim
Link: https://www.mdpi.com/2076-3417/10/9/3250

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