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Journal: Appl. Sci., 2021
Volume: 11
Number: 179

Article: Dynamic Pad Surface Metrology Monitoring by Swing-Arm Chromatic Confocal System
Authors: by Chao-Chang A. Chen, Jen-Chieh Li, Wei-Cheng Liao, Yong-Jie Ciou and Chun-Chen Chen
Link: https://www.mdpi.com/2076-3417/11/1/179

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