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Journal: Appl. Sci., 2022
Volume: 12
Number: 9049

Article: A Theoretical Method for Removal of Gravity-Induced Effects in Silicon Wafer Geometry Measurements
Authors: by Juan M. Trujillo-Sevilla, Jan Gaudestad and José M. Rodríguez-Ramos
Link: https://www.mdpi.com/2076-3417/12/18/9049

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