Simulation and Experimental Investigation of the Radial Groove Effect on Slurry Flow in Oxide Chemical Mechanical Polishing

Round 1

Reviewer 1 Report

The article is interesting. I like its arrangement and structure. The level of innovation and novelty it represents seems very important to me. I think that after a little linguistic correction, the manuscript can be published.

Author Response

Thanks for your review and comment.

Reviewer 2 Report

This manuscript details work involving the slurry flow on a pad surface and its effects on the oxide chemical mechanical polishing performance. It was reported that the slurry saturation time results were well correlated with the simulation prediction. A decent work although I have a few comments.

1. Please provide a reference for the commercial computational fluid dynamics software.

2. Certain terms were not defined in the equations given. For instance, what is δ_ij? Do not assume that the reader knows.

3. Please use the same number of significant figures in the tables.

4. In Figures 6 and 7, please use different line styles, such as dotted or dashed, to help distinguish between the different curves.

5. There are some minor typographical errors such as a lack of a space before a citation number. Please fix these issues.

6. Please better explain how this method would "save the cost of ownership".

Author Response

Thanks for your comment. The response was attached in the word file and the revision was done in the new manuscript

Author Response File: Author Response.pdf

Reviewer 3 Report

This paper investigated the effect of radial goove effect on slurry flow behavior in oxide chemical mechanical polishing based on both simulaiton and experimental methods. Some revisions are needed to further improve the manuscript. 

1) The overall language is needed to be checked and purified to make it more readable.

2) Please provide the overall meshed model for the simulation, as well as the mesh size distribution.

3) Besides the slurry saturation time, have you compared other information between simulaiton and experiment? Please enrich this part.

Author Response

Thanks for your comments. The response was attached in the word file and the revision was done in the new manuscript.

Author Response File: Author Response.pdf

Round 2

Reviewer 3 Report

The authors revised the manuscript in a satisfying way according to the comments.