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Journal: Appl. Sci., 2018
Volume: 8
Number: 2403
Article:
The Effect of Interfacial Ge and RF-Bias on the Microstructure and Stress Evolution upon Annealing of Ag/AlN Multilayers
Authors:
by
Claudia Cancellieri, Elizaveta Klyatskina, Mirco Chiodi, Jolanta Janczak-Rusch and Lars P. H. Jeurgens
Link:
https://www.mdpi.com/2076-3417/8/12/2403
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