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Journal: Appl. Sci., 2018
Volume: 8
Number: 2539

Article: Uncertainty Evaluation for Measurements of Pitch Deviation and Out-of-Flatness of Planar Scale Gratings by a Fizeau Interferometer in Littrow Configuration
Authors: by Xin Xiong, Yuki Shimizu, Xiuguo Chen, Hiraku Matsukuma and Wei Gao
Link: https://www.mdpi.com/2076-3417/8/12/2539

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