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Journal: Appl. Sci., 2019
Volume: 9
Number: 4091

Article: Dependence-Analysis-Based Data-Refinement in Optical Scatterometry for Fast Nanostructure Reconstruction
Authors: by Zhengqiong Dong, Xiuguo Chen, Xuanze Wang, Yating Shi, Hao Jiang and Shiyuan Liu
Link: https://www.mdpi.com/2076-3417/9/19/4091

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