A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications
Abstract
:1. Introduction
2. Fabrication Process and Waveguide Performances
2.1. Fabrication Processes
2.2. SiN Waveguide Optical Characterization
3. SiN for Coarse Wavelength Division Multiplexing (CWDM) Optical Transceivers in the O-Band
3.1. CWDM SiN Echelle Grating Multiplexer
3.2. SiN-Si Hybrid Grating Fiber Coupler
4. Optical Frequency Comb Generation in Annealing- and Crack-Free Si3N4
5. SiN for Near Infrared LIDAR
6. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Waveguide | Si Rib | Si Strip | SiN PECVD 1310 nm | Si3N4 LPCVD 1550 nm | SiN PECVD 940 nm | Si3N4 LPCVD 940 nm |
---|---|---|---|---|---|---|
dimension w × h (µm) | 0.4 × 0.3 | 0.35 × 0.3 | 0.7 × 0.6 | 0.75 × 0.75 | 0.6 × 0.3 | 0.6 × 0.3 |
Propagation Loss (dB/cm) | 1.5 | 3.6 | 0.8 | 1.5 | 1.5 | 1.0 |
3 sigma (dB/cm) | 0.45 | 0.9 | 0.3 | - | - | 0.4 |
Grating Type | Period (nm) | ΔxSi (nm) | Unetched/Etched Thickness (nm) | 2D-FDTD CWDM IL (nm) | 2D-FDTD 1 dB BW (nm) | Measured CWDM IL (dB) | Measured 1 dB BW (nm) |
---|---|---|---|---|---|---|---|
Si | 468–488 | - | 300/150 | 1.6–15 | 30 | 1.9–13.0 | 26 |
SiN | 965 | - | 600 | 6.8–10.0 | 54 | 8.0–13.0 | 45 |
Si/SiN a | 950 | 200 | 600 | 3.0–5.5 | 64 | - | - |
Si/SiN b | 975 | 150 | 600/50 | 2.7–6.9 | 50 | 2.9–5.2 | 48 |
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Wilmart, Q.; El Dirani, H.; Tyler, N.; Fowler, D.; Malhouitre, S.; Garcia, S.; Casale, M.; Kerdiles, S.; Hassan, K.; Monat, C.; et al. A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications. Appl. Sci. 2019, 9, 255. https://doi.org/10.3390/app9020255
Wilmart Q, El Dirani H, Tyler N, Fowler D, Malhouitre S, Garcia S, Casale M, Kerdiles S, Hassan K, Monat C, et al. A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications. Applied Sciences. 2019; 9(2):255. https://doi.org/10.3390/app9020255
Chicago/Turabian StyleWilmart, Quentin, Houssein El Dirani, Nicola Tyler, Daivid Fowler, Stéphane Malhouitre, Stéphanie Garcia, Marco Casale, Sébastien Kerdiles, Karim Hassan, Christelle Monat, and et al. 2019. "A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications" Applied Sciences 9, no. 2: 255. https://doi.org/10.3390/app9020255