Research Progress on Flexible Oxide-Based Thin Film Transistors
Abstract
:1. Introduction
2. Device Fundamental Concept and Conventional Configuration
2.1. Carrier Transport Mechanism of Oxide Semiconductor Materials
2.2. Typical Device Configurations
3. Approaches to Flexible Oxide-Based TFTs
3.1. Flexible TFTs on Different Kinds of Substrates
3.1.1. PET Flexible Substrate
3.1.2. PEN Flexible Substrates
3.1.3. Polyimide (PI) Flexible Substrate
3.2. Flexible TFTs under Mechanical Stress
3.2.1. Bending Test Platforms and Methods
3.2.2. Degradation of TFTs under Mechanical Stress
3.3. Optimized Ways for the Reduction of Mechanical Stress
4. Summary and Outlook
Author Contributions
Funding
Conflicts of Interest
References
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TFTs | Threshold Voltage (V) | Mobility (cm2 V−1 S−1) | On/Off Current | Subthreshold Swing (V dec−1) | Channel Material | Substrate | Temperature (°C) |
---|---|---|---|---|---|---|---|
Reference [71] | 4 | 20 | 105 | 0.26 | a-ZITO | PET | <150 |
Reference [69] | 5.4 | 7.53 | 104 | >2 | ZnO | PET | <150 |
Reference [150] | 1.3 | 21.3 | 2.7 × 107 | 0.23 | AZO | PET | room temperature |
Reference [151] | 2.85 | 8.0 | 2.51 × 107 | 0.23 | InGaZnO | PET | - |
Reference [57] | 1.2 | 66.7 | 2 × 107 | 0.33 | TZO | PET | 80 |
Reference [86] | 1.93 | 7.83 | ~108 | 0.24 | IGZO | PEN | 150 |
Reference [124] | 5.5 | 4.1 | ~108 | 0.2 | IZO:F | PEN | 200 |
Reference [154] | 4.1 | 15.5 | 2.2 × 108 | 0.2 | IGZO | PEN | 180 |
Reference [156] | 2.48 | 12.87 | 109 | 0.2 | IGZO | PEN | 150 |
Reference [157] | 0.1 | 5.39 | 2 × 105 | 0.81 | LZZO | PI | 320 |
Reference [158] | 0.95 | 10 | 2 × 109 | 0.069 | IGZO | PI | 150 |
Reference [159] | −0.6 | 9.5 | 4.5 × 108 | 0.109 | IGZO | PI | 150 |
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Zhang, L.; Xiao, W.; Wu, W.; Liu, B. Research Progress on Flexible Oxide-Based Thin Film Transistors. Appl. Sci. 2019, 9, 773. https://doi.org/10.3390/app9040773
Zhang L, Xiao W, Wu W, Liu B. Research Progress on Flexible Oxide-Based Thin Film Transistors. Applied Sciences. 2019; 9(4):773. https://doi.org/10.3390/app9040773
Chicago/Turabian StyleZhang, Lirong, Wenping Xiao, Weijing Wu, and Baiquan Liu. 2019. "Research Progress on Flexible Oxide-Based Thin Film Transistors" Applied Sciences 9, no. 4: 773. https://doi.org/10.3390/app9040773