High-Sensitive TM Modes in Photonic Crystal Nanobeam Cavity with Horizontal Air Gap for Refractive Index Sensing

We propose a new type of refractive index sensing based on the transverse magnetic (TM) modes in the photonic crystal (PhC) nanobeam (NB) cavity with a horizontal air gap. The electric field of the resonant TM mode is strongly confined within the horizontal air gap present at the PhC NB cavity. In order to increase the quality (Q) factor and the sensitivity (S) of the refractive index change in the air simultaneously, the cavity structure is fully optimized. Because of the trade-off between the Q-factor and S of the TM mode in the PhC NB cavity with an air gap, there is an optimal thickness of the air gap in the dielectric slot. From the numerical simulation results, S can exceed 1000 nm/RIU with Q > 40,000. When the dielectric slot becomes thin, S could be higher than 1200 nm/RIU. For practical applications, we suggest an Si-based PhC NB cavity with a horizontal SiO₂ slot structure which can also provide high S with a high Q-factor after a very fine selective wet etching process. This new type of TM resonant mode in the PhC NB cavity can be an ideal platform for compact sensors in photonic integrated circuits for TM waveguide systems.